Honorarprofessur Nanoelectronics Technologies
Forschungsschwerpunkte liegen auf den Gebieten:
- Process and material development for advanced interconnect systems
- Carbon nanotubes (CNT) for sensor and high frequency applications
- Concepts and metallization processes for the integration of electronics and micro/nanosystem components
- Atomic layer deposition of metal and metal oxide layers
- Materials and metallization for NEMS
- Simulation and modeling of devices, processes and equipment
- Spintronics
Weitere Informationen finden Sie auch unter:
https://www.enas.fraunhofer.de/de/Business_Units/Process,_Device_and_Packaging_Technology.html
Prof. Dr. Stefan E. Schulz
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Adresse: Telefon: +49 (0) 371 - 531 35186 |
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