Micro-Nano-Analytics Lab
SEM/FIB Zeiss Auriga40 with Analytics and Nanomanipulation
![Auriga](../bilder/equipment/Auriga.jpg)
Crossbeam Electron & Focus Ion Beam
Imaging: inLens SE, inLens BSE, Chamber SE and SI
Analytics: Oxford EBSD & EDX, Nanomanipulator: Omniprobe
Raman Imaging Microscope with AFM in Vacuum chamber
![Raman_AFM](../bilder/equipment/Raman_AFM.jpg)
WiTec Raman Spectrometer
SemiLab AFM
Vacuum compatible: SemiLab vacuum chamber with vacuum lock
Vakuum Shuttle: SEM compatible
Hysitron PI-88 SEM Picoindenter
![PI-88_inside_SEM](../bilder/equipment/PI-88_inside_SEM.jpg)
Hysitron PI-88xR inside Zeiss Auriga.
Nanomanipulator Imina™ Bots
![Imina™ Bot](../bilder/equipment/bot.jpg)
Four Nanomanipulator Bots
Nanomanipulation & electrical probing
Vacuum compatible
Resolution: 1nm
Electrical Bias TEM-Holder
![TEM-Holder](../bilder/equipment/TEM-Holder.jpg)
Electrical biasing (8 pin) sample holder for TEM
In-situ testing at nano scale
Electrically driving of Si-based MEMS
Signatone S-1160 Probe Station
![WaferProber](../bilder/equipment/WaferProber.jpg)
WaferProber placed inside EMV-box
4x S-725 micro manipulators (3 axes)
Probing individual chips and wafers up to 8"
Hot plate for reticles (max 500°C)
Microscope with WD = 34 mm
Sputter Coater Polaron E5000
![Polaron E5000](../bilder/equipment/PolaronE5000.jpg)
DC Sputter Coater
Thin metals like Au, Al or Pt