Equipment of the Professorship Micromanufacturing Technology
Machinery
KERN Pyramid Nano
High Precision Machining Centre
Technical specifications:- Hydrostatic axes and guideways
- 5-axis simultaneous machining
- Position uncertainty: ±0.5 µm
- Additional spindle for grinding and micromachining up to 160,000 min-1
- Systems for automatic tool and workpiece measuring
- Cooling lubrication with emulsion or MQL
- Suction system for graphite machining
- High precision machining and micromanufacturing of metallic and non-metallic materials
- Generation of functional surfaces
- Grinding
SPINNER PD 32
Precision-Turning Machine
Technical specifications:- Main and opposed spindle
- Turret with operated tools
- Process- integrated measurement system for cutting force and power detection
- Cooling lubrication with emulsion
- Precision-processing of special materials and hardened steels
- Productions of side elements (e. g. boreholes, threads, spanner flats, ...)
Kugler Microgantry® GU
Microprocessing Machine
Technical specifications:- 4 CNC-axes
- High-frequency spindle with max. 200,000 rpm
- Position exactness: ±0.3 µm
- Minimal oil machining system
- Integrated Nd:YVO4-laser (wavelength of 532 nm via frequency doubling)
- Microprocessing (i.e. drilling, milling, sawing) und microstructuring (i.e. laser-beam removing)
- Machining of non-ferrous metals
Zimmer & Kreim genius700
EDM Die-sinking Machine
Technical specifications:- 4-axes simultaneous machining
- Positioning uncertainty: ±1 µm / 0.001 °
- Max. workpiece weight: 700kg
- Max. electrode weight: 50 kg static / 50 kg with rotation
- Rotation spindle with 1000 rpm and high-pressure flushing device for EDM-drilling with high aspect ratio
- Generator with 52 A working current
- Generator modules for special materials and polishing processes
- Precision- and micro-machining of metal, conductive ceramics and diamond
- Drilling of bores with min. ⌀ 0.2 mm
Sarix SX-100
Precision Microerosion Machine
Technical specifications:- Workspace: 510 mm x 270 mm
- Travel range X-, Y-, Z-direction: 250 mm, 150 mm, 150 mm
- Travel precision: ±2 µm at 50 mm travel range
- Micromachining (erode) of Metal
- Micromachining (erode) of ceramics
- Machining of Microholes down to 50 µm in diameter
Prototype ECM system
Modular Self-construction for Jet-ECM and PECM
Technical specifications:- Triaxial-system in portal construction-manner
- Maximum voltage: 56 V
- Maximum current: 10 A
- Direct current and pulsed direct current
- Maximum electrolyte pressure: 525 bar
- Electrolytes: sodium chloride and sodium nitrate
- Equipment for electro-chemical microprocessing
The prototype has been pursued in cooperation with the Fraunhofer-Institute for Machine Tools and Forming Technology IWU.
Prototype Jet-PeP system
Modular set-up for Jet-PeP
Technical specifications:- 4-axes gantry system
- Maximum voltage: 600 V
- Maximum current: 8.5 A
- Direct current
- Maximum electrolyte pressure: 5 bar
- Ammonium sulphate-based electrolytes
- Localized plasma-electrolytic polishing
P.FÜ.MA 200kN
Precision Joining Machine
Technical specifications:- Working chamber: 500 x 500 mm2
- Press stroke: 400 mm
- Press capacity: Fmax = 200 kN
- Spindle velocity: vmax = 3000 mm/min
- AC servo-drive
- Development of procedures and tool systems for plane microstructuring
Branson Ultraweld L20
Ultrasonic Joining System
Technical specifications:- Operation frequency: 20 kHz
- Power output: Pmax = 4 kW
- Maximum joining area Fügefläche: Amax = 125 mm²
- Modular tooling system
- Automatic frequency control
- Consistency of the amplitude and load compensation
- Development of methods for joining of dissimilar compounds (e.g. metal – CFRP)
- Development of modular and microstructured ultrasonic joining tools and joining surfaces
Ultimaker 3
Dual Extruder FDM Drucker
Technical specifications:- Printdimensions: 215 mm x 215 mm x 200 mm
- Printable materials: PLA, ABS, PVA, ...
- Height resolution: 20 µm
- Nozzlediameter: 0,4 mm
- Rapid Prototyping
- Practical courses for additive manufacturing
Thermal fuel cell test bench
Self-construction for characterization of fuel cell cooling
Technical specifications:- Temperature measurement by means of thermocouple
- Regulated test power up to 4 W/cm2
- System pressure up to 1 bar
- Volume flow up to 2.8 l/min
- Different cooling media possible
- Optical in-situ characterization of the coolant flow
- UInvestigation of heat transfer and flow behavior in bipolar plates and stack assemblies
Measurement equipment
Workstation for measurement of roughness, shape and position
Roughness Measurement System LD 120
Technical specifications:- Touching Distance: 0.1 - 120 mm
- Measurement range: 10 mm
- Resolution in z-direction: 2 nm
- Rz-residual values: 35 nm
- Measurement point distance in x-direction: 0.05 - 1 µm
- CNC-y-table (smalest increment: 0.5 µm)
- Roughness measurements of micro-sized components
- Measurement of topography of surfaces for evaluation of functional behaviour
- Measurement of tools for turning and milling machines
- Evaluation of twist parameters
Mahr MarForm MMQ 200
Technical specifications:- High-precision roundness measurement axis (C)
- Motorized vertical measurement axis (Z)
- Motorized horizontal positioning (X)
- Manual centering and tilting table
- Determination of:
- Cylindrical Shape
- Form and position tolerances according DIN ISO 1101
- Roundness
- Flatness
- Concentricity and other parameters
Dataphysics OCA 200
Contact Angle Measuring and Drop Contour Analysis System
Technical specifications:- high-performance camera system with 10-fold zoom lens
- engine-powered sample table
- electronic direct dosing system
- nanoliter dosing system
- Peltier temperature control unit -30 °C ...160 °C
- measurement of the static and dynamic contact angle
- temperature-dependent evaluation of the wettability
- evaluation of surface energy, suface tension and interfacial tension
DMG Microset VIO 20/50 linear
Tool Pre-setting System
Technical specifications:- Precision spindle
- Translative axes with linear drives and glass scales
- Incident light and transmitted light
- Decond camera for measuring the center height (with incident light)
- Maximum tool diameter of 420 mm, maximum length of 500 mm
- Substantial measurement software
- Measurement of tools for turning and milling machines
- Evaluation of tool abrasion
Bruker alicona µCMM
Optical coordinate measuring machine
Technical specifications:- Non-contact measurements using shape-from-defocus method
- Automated change of objectives
- Finest lateral topographic resolution about 0.6 µm, finest vertical resolution ca. 10 nm
- Granite machine bed and gantry with air-bearing axes and linear drives
- Working space for three-axis applications about (310 mm)³
- Integrated dividing head with motorised rotary and swivel axis
- Comprehensive software for realisation and analysis of measurements
- Examination of the geometry of cutting tools including cutting edges and wear
- Capture of surface topography
- Analysis of the geometry of microstructures
- Determination of deviations in dimension, form, location, and run-out
Keyence VK-9700
3D-Laserscanning-Microscope
Technical specifications:- Violet laser diode and halogen lamp
- Maximal z-axis resolution of 1nm
- Objectives with the following magnification rates: 10x, 20x, 50x, 100x, 150x
- Automatic measurements through engine-powered microscope stage
- Optical surface detection
- Measurement of microstructures
- Measurement of tools for turning and milling machines
- Evaluation of the tool abrasion
Keyence VHX-100
3D-Microscope
Technical specifications:- 18 million pixel resolution
- Three-dimensional display function
- Valuation of tool wear
- Evaluation of surface features
Nikon MM-400
Microscope for Measurement
Technical specifications:- Objectives with magnifying of 2.5x, 10x, 20x, 50x, 100x
- Micrometer-positioning table (150 mm x 100 mm)
- Measurement of microstructures
- Valuation of tool wear
- Measurement of microforming tools
- Measurement of turning- and milling tools
- Evaluation of surface features
Polytec Modular Laser-Vibrometersystem
OFV-5000 Controller
Technical specifications:- Digital Broadband-decoder VD-09:
- Broadband: 0 – 2.5 MHz
- Maximum Speed: 10 m/s
- Resolution: 0.02 µm/s
- Digital broadband-decoder DD900:
- Resolution of travel: 15 pm
- Frequency: 0 – 2.5 MHz
- Contactless mesure of vibration
- Mesurement of minimal length movements
OFV-505 Vibrometer-Mesurement Unit
Technical specifications:- He-Ne Laser with wavelengh of 633 nm
- Working distance > 250 mm to ca. 5 m
Sartorius ME36S
Micro Scale
Technical specifications:- Weighing range: 31 g
- Reading precision: 0.001 mg
- Reproducibility: ≤ 2 µg
- Fully automated calibration and adjustment function
- Determination of the removed mass after electrochemical machining processes via differential weighing
Sartorius ME614S-0CE
Analytical Scale
Technical specifications:- Weighing range: 10 mg – 610 g
- Reading precision: 0.1 mg
- Fully automated calibration and adjustment function
- Determination of the removed mass after electrochemical machining processes via differential weighing
- Determination of the (through abrasion) removed mass, for tribological investigations
Software
COMSOL Multiphysics®
FEM Simulations Software
- 2D- and 3D-environment
- Available Modules:
- AC/DC Module
- Acoustics Module
- CFD Module
- Electrodeposition Module
- Heat Transfer Module
- Microfluidics Module
- Nonlinear Structural Materials Module
- Optimization Module
- Plasma Module
- Structural Mechanics Module
- CAD-Import
- Material Library
Server infrastructure with 1024 GB RAM and 96 CPU cores
Information about server operation via intranet [de]
Siemens Simcenter STAR-CCM+ (Version 2021.2)
Multiphysics FVM simulations software
- Main focus:
- Fluid mechanics
- Multiphase flows
- Particle flows
- Heat transfer
- Electrochemical processes
- Geometry spectrum: 2D, complex 3D structures
- CAD interfaces for common CAD formats
- Automation by means of individual macros
- Integrated pre- and post-processing
MountainsMap7.4®
Surface Imaging, Analysis and Metrology Software
- Data analysis of all file formats (confocal microscopes, white light interferometers, scanning probe microscopes, contact and non-contact profilometers)
- Universal data export
- Determination of areal surface characteristics
Miscellaneous Equipment
- CO2 snow-jet cleaning-device
- Microscopes
- Modular laser vibrometer Polytec OFV-5000
- Pyrometer Infratherm IP 140
- Digital height measuring system Mahr 817 CLM-2D