Professorship of Electronic Devices of Micro and Nano Technique
Professorship of Electronic Devices of Micro and Nano Technique
Professorship of Electronic Devices of Micro and Nano Technique 

Measuring Equipment at the Professorship


  • Mixed-signal-Oszilloskop Agilent MSO9404A (4 Ghz, 4 analog and 16 digital Channels)
    • Option MSO9000A-001: RS-232/UART Protocol Triggering and Decode
    • Option MSO9000A-007: I2C/SPI Protocol Triggering and Decode
    • Option MSO9000A-008: CAN, LIN, FlexRay Protocol Triggering and Decode
    • Option MSO9000A-016: Xilinx FPGA dynamic probe
    • Differential High Voltage Probe N2891A - 70 Mhz
    • Passive High Voltage Probe 10076B - 4 kV, 250 Mhz
    • 2 Stck. Differential Probe N2752A - 6 GHz
  • Logic Analyzer Agilent 16822A
    • 68-channel portable logic analyzer
    • 48-channel pattern generator with up to 300 MVector/s speed and 16 M vector depth
    • 4 GHz (250 ps) timing zoom with 64 K memory
    • 1.0 GHz / 500 MHz (half / full-channel) conventional timing with deep memory
    • PODS:
      • 6x 10476A 1,8-V-Daten-Pod und Leitungssatz
      • 1x 10475A 1,8-V-Takt-Pod und Leitungssatz
      • 6x 10483A 3,3-V-Daten-Pod und Leitungssatz
      • 1x E8140A LVDS-Takt-Pod und Leitungssatz
      • 1x E8141A LVDS-Daten-Pod und Leitungssatz
      • 1x 10461A TTL-Daten-Pod und Leitungssatz
      • 1x 10460A TTL-Takt-Pod und Leitungssatz

    Logic Analyzer Measuring Station
  • Manual Probe System PM8 (Süss Microtec, later Cascade Microtech, now FormFactor)
  • Semiconductor Test System HP 4062UX
    • Modular DC Source/Monitor Mainframe 4142B mit
      • 2x 41420A High Power Source/Monitor Unit (HPSMU)
      • 2x 41421A Medium Power Source/Monitor Unit (MPSMU)
      • 1x 41424A Voltage Source/Voltage Monitor Unit (VSVM)
      • 1x GROUND Unit (GNDU)
    • 4280 1MHz Capacitance Meter (CM)
    • 8-Slot Precision Measurement Mainframe E5270B mit
      • 2x E5287A High Resolution Source/Monitor Unit (HRSMU)
      • 1x E5288A Atto-sense and Switch Unit (ASU)
      • 2x E5280B High Power Source/Monitor Unit (HPSMU)
      • 1x GROUND Unit (GNDU)
    • 4084 Switching Matrix
  • 82357A USB/GPIB Interface
  • Wafer Prober PA200 (Süss Microtec, later Cascade Microtech, now FormFactor)
    • 8" Chuck: TA1G8
    • Probes: PH100, PH150, PH110HF
  • 2 semi-automatic Wafer Prober PA300 (1x Measuring Temperature Range -60 ... +300 °C, Süss Microtec, later Cascade Microtech, now FormFactor)

    Wafer Prober PA300 in our Clean Room
  • Climatic Chamber T-40/25 (CTS), -40 ... 180 °C
  • Power Device Analyzer B1505A (Agilent Technologies)
  • Laser Cutting System EzLaze 3 (New Wave Research, now ESI)
  • Laser Scanning Microscope Axiotron (Zeiss)
  • Electrostatic Discharge Simulator ESS-2002 (Noisken)
  • Logic Analyzer HP16500B with Prototype Analyzer HP 16505A, Modules:
    • 2 x HP 16555A 68-Channel 110 MHz State / 500 MHz Timing Logic Analyzer Module with 1M of acquisition memory
    • 1 x HP 16522A 20-Channel 200 MHz clock or 40-Channel 100 MHz clock Pattern Generator Module
  • Network / Spectrum / Impedance Analyzer HP4395A (10 Hz ... 500 MHz)
    • Option 001 (DC voltage/current source)
    • Option 010 + 43961A RF Impedance Test Kit
    • 87512A Transmission/Reflection Test Set
  • N5242A PNA-X Network Analyzer 10 MHz ... 26,5 GHz (Agilent Technologies)
  • Wavetek 50MHz Synthesized Arbitrary Waveform Generator Model 296
  • Tektronix 500MHz Oscilloscope TDS744A
  • Precision LCR Meter HP4284A
  • Ultrasound Microscope up to 400 MHz (KSI, Resolution about 2 µm)
  • Lifetime Scanner WT-85 (Semilab)
  • Measuring Station for unilluminated I-V Curves of Solar Cells
  • Measuring Station for illuminated I-V Curves of Solar Cells (Self-Construction)
  • Complex Spectral Measuring Station for Solar Cells
  • Measuring Station for capacitive Pressure Sensors
  • TLP50 Measuring Station (Self-Construction)
  • Standard measuring Equipment for Circuit Development
  • FPGA Development System XILINX Spartan-3AN (based on XC3S700AN)
  • Microcontroller Development System

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