Publikationen

Berdinsky, A.S.; Shaporin, A.V.; Yoo, J.-B.; Park, J.-H.; Alegaonkar, P.S.; Han, J.-H.; Son, G.-H.: Field Enhancement Factor for an Array of MWNTs in CNT Paste – Applied Physics A: Materials Science & Processing, Vol. 83 no. 3, pp. 377-383  – ISSN 1432-0630 (Print) ISSN 0947-8396 (Online)

Forke, R.; Scheibner, D.; Mehner, J.; Gessner, T.; Dötzel, W.: Electrostatic Force Coupling of MEMS Oscillators for Spectral Vibration Measurements – Proceedings, M2B-O2 – Eurosensors XX, Göteborg (Sweden), 2006 Sep 17-20  – ISBN 91-631-9281-0

Dötzel, W.: Mikrosystemtechnik - Wachstum ins Kleine – Sitzungsberichte der Sächsischen Akademie der Wissenschaften zu Leipzig, Technikwissenschaftliche Klasse Band 2, Heft 1  – ISBN 3-7776-1443-4

Forke, R.; Scheibner, D.; Mehner, J.; Gessner, T.; Dötzel, W.: Micromachined Force Coupled Sensor-Actuator System for Frequency Selective Vibration Monitoring – Proceedings, pp. 928-931 – Actuator, Bremen (Germany), 2006 Jun 14-16  – ISBN 3-933339-08-1

Gessner, T.; Bonitz, J.; Kaufmann, C.; Kurth, S.; Specht H.: MEMS Based Micro Scanners: Components, Technologies and Applications – Proceedings – Actuator, Bremen (Germany), 2006 Jun 14-16  – ISBN-3-933339-09-X

Hanf, M.; Shaporin, A.V.; Hahn, R.; Dötzel, W.; Gessner, T.: Micro Mirror Array as Novel Encoding Mask in a Hadamard Transform Spectrometer – Proceedings, pp. 732-735 – Actuator, Bremen (Germany), 2006 Jun 14-16  – ISBN-3-933339-08-1

Kolchuzhin, V.; Mehner, J.; Gessner, T.; Dötzel, W.: Parametric Finite Element Analysis for Reduced Order Modeling of MEMS – Proceedings, pp. 507-510 – EuroSimE 2006 - 7th International conference on thermal, mechanical and multi-physics simulation and, Como (Italy), 2006 Apr. 23-2  – ISBN 1-4244-0275-1

Kolchuzhin, V.; Mehner, J.; Gessner, T.; Dötzel, W.: Parametric Simulation of MEMS Based on Automatic Differentiation of Finite Element Codes – Proceedings, Vol. 3, pp. 507-510 – NSTI Nanotechnology Conference and Trade Show "Nanotech 2006", Boston (USA), 2006 May 7-11  – ISBN 0-9767985-8-1

Leidich, S.; Voigt, S.; Kurth, S.; Gessner, T.: Microwave Phase Shifter with Electromagnetic Signal Coupling in Silicon Bulk Technology – Int. J. Microwave and Optical Techn., Vol. 1, pp. 1-9  – ISSN 1553-0396

Markert, E.; Dienel, M.; Herrmann, G.; Müller, D.; Heinkel, U.: Modeling of a new 2D Acceleration Sensor Array using SystemC-AMS – Journal of Physics: Conference Series, Vol. 34, pp. 228-234  – ISSN 1742-6588

Mehner, J.; Forke, R.; Scheibner, D.; Dötzel, W.; Gessner, T.: A Tunable Resonant Vibration Measurement Unit Based on a Micromachined Force Coupled Sensor-Actuator System – Proceedings, pp. 803-806 – IEEE Sensors, Daegu (Korea), 2006 Oct 22-25  – ISSN 1930-0395 – DOI/URL: 10.1109/ICSENS.2007.355589

Seifert, M.; Hiller, K.; Frühauf, S.; Hanf, M.; Pohl, R.; Shaporin, A.V.: Arrays of Sensors with Variable Stiffness – Proceedings, pp. 319-321 – The VI scientific conference "Solid state chemistry and modern micro and nano technologies", Kislovodsk (Russia), 2006 Sep 18-23  – ISBN 5-9296-0157-7

Voigt, S.; Leidich, S.; Kurth, S.; Gessner, T.; Dötzel, W.: 24 GHz RF-MEMS Phase Shifter with Non-Galvanic Electromagnetic Coupling Fabricated in Silicon-Bulk Technology – Journal of Physics: Conference Series, Vol. 34, pp. 228-234  – ISSN 1742-6588

Reuter, D.; Bertz, A.; Billep, D.; Scheibner, D.; Dötzel, W.; Gessner, T.: In-process Gap Reduction of Capacitive Transducers – Sensors and Actuators A: Physical, Volume 126, pp. 211-217  – ISSN 0924-4247

Scheibner, D.; Mehner, J.; Reuter, D.; Gessner, T.; Dötzel, W.: A Spectral Vibration Sensor Based on Tunable Micromechanical Resonators – Sensors and Actuators A: Physical, Volumes 123-124, pp. 63-72  – DOI/URL: 10.1016/j.sna.2005.03.034

Billep, D.; Hiller, K.; Frömel, J.; Tenholte, D.; Reuter, D.; Dötzel, W.; Gessner, T.: Post-Processing Gap Reduction in a Micromachined Resonator for Vacuum Pressure Measurement – SPIE Conference: Microtechnologies for the New Millennium, Sevilla (Spain), 2005 May 09-11  – ISBN 0-8194-5831-7

Dienel, M.; Shaporin A.V.; Richter, G.; Kolchuzhin, V.; Billep, D.; Dötzel,W.: Komponentenentwurf – Proceedings, pp. 129-136 – 7. Chemnitzer Fachtagung Mikrosystemtechnik- Mikromechanik & Mikroelektronik, Chemnitz (Germany), 2005 Oct 26-27  – ISBN 3-00-016889-3

Dienel, M.; Billep, D.; Dötzel, W.: Development of a Drift Compensated Acceleration Sensor Array – Proceedings, pp. 227-228 – 50. Internationales wissenschaftliches Kolloquium, Ilmenau, 2005 Sep 19-23  – ISBN 3-932633-98-9

Dötzel, W.: Mikrosystemtechnik - Wachstum ins Kleine – Vortrag – Sächsische Akademie der Wissenschaften, Leipzig (Germany), 2005 Mar

Forke, R.; Mehner, J.; Dötzel, W.; Gessner, T.: Mikromechanisches gekoppeltes Schwingsystem für frequenzselektive Vibrationsmessungen – Proceedings, pp. 143-148 – 7. Chemnitzer Fachtagung Mikrosystemtechnik- Mikromechanik & Mikroelektronik, Chemnitz (Germany), 2005 Oct 26-27  – ISBN 3-00-016889-3

Hanf, M.; Shaporin, A.V.; Hahn, R.; Dötzel, W.; Gessner, T.: Novel Hadamard transform spectrometer realized using a dynamically driven micro mirror array as light modulator – Proceedings, SPIE Vol. 5717 (16), pp. 117-126 – SPIE Int. Society for Optical Engineering  – ISBN 0-8194-5691-8

Hanf, M.; Shaporin, A.V.; Dötzel, W.: Charakterisierungsmethode für mikromechanische Feder-Masse-Dämpfer-Systeme – Proceedings, pp. 149-153 – 7. Chemnitzer Fachtagung Mikrosystemtechnik- Mikromechanik & Mikroelektronik, Chemnitz (Germany), 2005 Oct 26-27  – ISBN 3-00-016889-3

Hiller, K.; Küchler, M.; Billep, D.; Schröter, B.; Dienel, M,; Scheibner, D.; Gessner, T.: Bonding and Deep RIE - a powerful combination for high aspect ratio sensors and actuators – Proceedings, SPIE Vol. 5715, pp. 80-91 – SPIE Micromachining and Microfabrication Process Technology X, 2005 Jan  – ISBN 0-8194-5689-6

Kolchuzhin, V.: The Physical Simulation of Electrostatic Microsystems with Finite Element Method – IEEE Siberian Workshop on Electron Devices and Materials "EDM 2005", NSTU, Novosibirsk (Russia)  – ISBN 5-7782-0491-4

Kolchuzhin, V.; Mehner, J.; Shaporin, A.V.; Dötzel, W.; Gessner, T.: New Parametric Variational Techniques for MEMS Simulation Based on Finite Element Method – Proceedings, pp.229-230 – 50. Internationales wissenschaftliches Kolloquium, Ilmenau (Germany), 2005 Sep 19-23  – ISBN 3-932633-98-9

Kolchuzhin, V.; Mehner, J.; Dötzel, W.: Geometrically Parameterized Finite Element Model of the Silicon Strain Gauge – Proceedings, pp.190-195 – 7. Chemnitzer Fachtagung Mikrosystemtechnik- Mikromechanik & Mikroelektronik, Chemnitz (Germany), 2005 Oct 26-27  – ISBN 3-00-016889-3

Markert, M.; Dienel, M.; Zeun, H.: Entwicklung eines Universellen Bewegungsanalyse-Systems auf Basis inertialer Messwerte – Proceedings, pp. 199-200 – 7. Chemnitzer Fachtagung Mikrosystemtechnik- Mikromechanik & Mikroelektronik, Chemnitz (Germany), 2005 Oct 26-27  – ISBN 3-00-016889-3

Markert, E.; Schlegel, M.; Dienel, M.; Herrmann, G.; Müller, D.: Modelling of a New Acceleration Sensor as part of a 2D Sensor Array in VHDL-AMS – Proceedings, Vol. 3, pp. 399-402 – NSTI Nanotechnology Conference and Trade Show  – ISBN: 0-9767985-2-2

Mehner, J.; Shaporin, A.V.; Kolchuzhin, V.; Dötzel, W.; Gessner, T.: Parametric Model Extraction for MEMS Based on Variational Finite Element.Techniques – Proceedings, Vol. 1, pp. 776-779 – Transducers '05 - 13th International Conference on Solid-State Sensors, Actuators and Microsystems, Seoul (Korea), 2005 Jun 4-9  – ISBN 0-7803-8995-6

Mehner J.; Shaporin, A.V.; Kolchuzhin, V.; Dötzel W.; Gessner T.: Novel Modeling Techniques of MEMS Sensors and Actuators for Electronic and System Design in Automotive Applications – 2. Fachkongress "Microcar 2005" Mikrowerkstoffe, Nanowerkstoffe für den Automobilbau, Leipzig (Germany)

Mehner, J.; Shaporin, A.V.; Kolchuzhin, V.; Dötzel, W.; Gessner, T.: Finite Element Based Reduced Order Modeling of Micro Electro Mechanical Systems (MEMS) – Mikrosystemtechnik Kongress, Freiburg (Germany)  – ISBN 978-3-8007-2926-5

Mehner, J.; Shaporin, A.V.; Kolchuzhin, V.; Dötzel, W.; Gessner, T.: Variational Finite Element Technologies for Parametric Model Extraction of MEMS – MICRO SYSTEM Technologies 2005 - Micro-, Electro-Mechanical, Opto & Nano Systems - International, Munich (Germany)

Reuter, D.; Bertz, A.; Billep, D.; Scheibner, D.; Buschnakowski, S.; Dötzel, W.; Gessner, T.: In-process Gap Reduction of Capacitive Transducers – Proceedings, pp. 1358-1361 – Transducers '05, Seoul (Korea), 2005 Jun 4-9  – ISBN 0-7803-8995-6

Shaporin, A.V.; Hanf, M.; Dötzel, W.: Novel characterization method for MEMS devices – Proceedings, SPIE Vol. 5716 (25), pp. 198-206 – SPIE International Society for Optical Engineering  – ISBN 0-8194-5689-6

Shaporin, A.V.; Hanf, M.; Dötzel, W.: Efficient MEMS Characterization Technique for Spring-Mass-Damping Systems – Proceedings, pp. 443-444 – 50. Internationales wissenschaftliches Kolloquium, Ilmenau (Germany), 2005 Sep 19-23  – ISBN 3-932633-98-9

Tenholte, D.; Kurth, S.; Billep, D.; Gessner, T.; Dötzel, W.: Ein mikromechanischer Vakuumsensor nach dem Reibungsprinzip einsetzbar bei hohen Temperaturen – Proceedings, pp. 77-82 – 7. Chemnitzer Fachtagung Mikrosystemtechnik- Mikromechanik & Mikroelektronik, Chemnitz (Germany), 2005 Oct 26-27  – ISBN 3-00-016889-3

Tenholte, D.; Kurth, S.; Gessner, T.; Dötzel, W.: Ein mikromechanischer Vakuumsensor nach dem Reibungsprinzip – Proceedings, pp. 191-192 – 50. Internationales Wissenschaftliches Kolloquium, Ilmenau (Germany), 2005 Sep 19-23  – ISBN 3-932633-98-9

Voigt, S.; Leidich, S.; Kurth, S.; Gessner, T.; Dötzel, W.: Koplanare elektromagnetische Koppler zur Signalkontaktierung von RF-MEMS Bauelementen bei Mikrowellenfrequenzen – Mikrosystemtechnik Kongress, Freiburg (Germany), 2005 Oct 10-12  – ISBN 978-3-8007-2926-5, ISBN 3-8007-2926-1

Wolfram, H.; Schmiedel, R.; Hiller, K.; Aurich, T.; Günther, W.; Dötzel, W.; Gessner, T.: Modellierung, Reglerentwurf und Praxistest eines hochdynamischen MEMS-Präzisionsbeschleunigungssensors – 5. GMM/ITG/GI-Workshop Multi-Nature Systems, Dresden (Germany), 2005 Feb 18

Wolfram, H.; Schmiedel, R.; Hiller, K.; Aurich, T.; Günther, W.; Kurth, S.; Mehner, J.; Dötzel, W.; Gessner, T.: Model Building, Control Design and Practical Implementation of a High Precision, High Dynamical MEMS Acceleration – Proceedings – SPIE Conference: Microtechnologies for the New Millennium, Sevilla (Spain), 2005 May 09-11  – ISBN 0-8194-5831-7

Wolfram, H.; Schmiedel, R.; Aurich, T.; Mehner, J.; Gessner, T.; Dötzel, W.: Model Building, Control Design and practical Implementation of a MEMS Acceleration Sensor – Proceedings – 50. Internationales Wissenschaftliches Kolloquium, Ilmenau (Germany), 2005 Sep 19-23  – ISBN 3-932633-98-9

Wolfram, H.; Specht, H.; Schmiedel, R.; Aurich, T.; Dötzel, W.: Implementation Issues on MEMS -- Study on System Identification – Proceedings, pp. 64-71 – 7. Chemnitzer Fachtagung Mikrosystemtechnik- Mikromechanik & Mikroelektronik, Chemnitz (Germany), 2005 Oct 26-27  – ISBN 3-00-016889-3

Seifert, M.; Shaporin, A.V.; Hiller, K.; Frühauf, J.; Pohl, R.: Niedertemperaturbonden für rekonfigurierbare Resonatorarrays – Proceedings, pp. 172-179 – 7. Chemnitzer Fachtagung Mikrosystemtechnik- Mikromechanik & Mikroelektronik, Chemnitz (Germany), 2005 Oct 26-27  – ISBN 3-00-016889-3

Geiger, W.; Breng, U.; Deppe-Reibold, O.; Fuchs, W.; Gutmann, W.; Hafen, M.; Handrich, E.; Huber, M.; Kunz, J.; Leinfelder, P.; Newzella, A.; Ohmberger, R.; Ruf, M.; Schröder, W.; Spahlinger, G.; Rasch A. (LITEF GmbH, Freiburg); Hiller, K.; Billep, D. (Chemnitz University of Technology): Test Results of the Micromechanical Coriolis Rate Sensor µCORS II – DGON 2004 Symposium Gyro Technology, Stuttgart (Germany)

Hanf, M.; Dötzel, W.: Characterization of charges in MEMS devices – Proceedings, pp. 498-501 – Actuator, Bremen (Germany)  – ISBN-3-933339-06-5

Hanf, M.; Kurth, S.; Billep, D.; Hahn, R.; Faust, W.; Heinz, S.; Dötzel, W.; Gessner, T.: A Dynamically Driven Micro Mirror Array as Light Modulator in a Hadamard Transform Spectrometer (HTS) – Proceedings – Eurosensors XVIII, Rom (Italy)

Hanf, M.; Dötzel, W.: Micromechanical electrostatic field sensor for the characterization of charges in MEMS devices – Sensors and Actuators A: Physical, Volume 115, Issue 2-3 SPEC. ISS., pp. 280-285  – DOI/URL: 10.1016/j.sna.2004.03.070

Hanf, M.; Markert, J.; Dötzel, W.: Measurement and evaluation of surface of micro mechanical mirror structures – XI. Internationales Colloquium on Surfaces, Chemnitz (Germany), 2004 Feb 2-3  – ISBN 3-8322-2418-1

Scheibner, D.; Mehner, J.; Reuter, D.; Kotarsky, U.; Gessner, T.; Dötzel, W.: Characterization and self-test of electrostatically tunable resonators for frequency selective vibration measurements – Sensors and Actuators A: Physical, Volume 111, Issue 1, pp. 93-99  – DOI/URL: 10.1016/j.sna.2003.10.010

Schröter, B.; Mehner, J.; Hiller, K.; Gessner, T.; Dötzel, W.: A Novel Microactuator Based on the Working Principle of a Step-by-Step Switchgear – Proceedings, pp. 242-245 – Actuator, Bremen (Germany)  – ISBN 3-933339-06-5

Shaporin, A.V.; Kolchuzhin, V.; Mehner, J.; Dötzel, W.: Parametric Variational Finite Element Method for MEMS Electrostatic Problems – Proceedings, pp. 39-46 – 10. GMM, Cottbus (Germany)  – ISSN 0947-1413

Scheibner, D.; Mehner, J.; Reuter, D.; Gessner, T.; Dötzel, W.: A Spectral Vibration Detection System Based on Tunable Micromechanical Resonators – Proceedings, B3.1 – Eurosensors XVIII, Rome (Italy), 2004 Sep 13-15

Bennini, F.; Mehner, J.; Dötzel, W.: System Level Simulations of MEMS Based on Reduced Order Finite Element Models – International Journal of Computational Engineering Science, Vol. 2, Nr. 2, pp. 385-388, 2003 Jun  – ISSN 1465-8763

Geiger, W.; Breng, U.; Leinfelder, P.; Gutmann, W.; Ohmberger, R.; Kunz, J.; Ruf, M.; Huber, M.; Ryrko, B.; Hafen, M.; Spahlinger, G.; Schröder, W.; Handrich E. (LITEF GmbH Freibu; Hiller, K.; Billep D. (Chemnitz University of Technology): The micromechanical Coriolis Rate Sensor µCORS II – Symposium Gyro Technology, Stuttgart (Germany)

Hanf, M.; Kurth, S.; Billep, D.; Hahn, R.; Faust, W.; Heinz, S.; Dötzel, W.; Gessner, T.: Application of micro mirror arrays for Hadamard transform optics – 9th International Symposium on Microwave and Optical Technology (ISMOT2003), Ostrava (Czech Republic)

Hanf, M.; Dötzel, W.: Micromechanical electrostatic field sensor for the detection of surface charges – Proceedings, pp. 374-375 – Eurosensors XVII, Guimaraes (Portugal)

Scheibner, D.; Mehner, J.; Reuter, D.; Gessner, T.; Dötzel, W.: Tunable Resonators with Electrostatic Self Test Functionality for Frequency Selective Vibration Measurements – Proceedings, pp. 526-529 – MEMS 2003, Kyoto (Japan), 2003 Jan 20-23  – ISBN 0-7803-7744-3

Scheibner, D.; Mehner, J.; Brämer, B.; Gessner, T.; Dötzel, W.: Wide Range Tunable Resonators for Vibration Measurements – Microelectronic Engineering, Vol. 67-68, pp. 542-549  – ISSN 0925-1030 – DOI/URL: 10.1109/MEMSYS.2003.1189802

Scheibner, D.; Wibbeler, J.; Mehner, J.; Brämer, B.; Gessner, T.; Dötzel, W.: A Frequency Selective Silicon Vibration Sensor with Direct Electrostatic Stiffness Modulation – Analog Integrated Circuits and Signal Processing, pp. 35-43

Mehner, J.; Dötzel, W.; Schauwecker, B.; Ostergard, D.: Reduced Order of Fluid Structural Interactions in MEMS Based on Modal Projection Techniques – Proceedings, pp. 1840-1843 – 12. International Conference on Solid State Sensors, Actuators and Microsystems, Boston (USA)

Mehner, J.; Shaporin, A.V.; Dötzel, W.: Simulation for MEMS - Packaging – Mems Packaging Workshop 2003, Chemnitz (Germany)

Mehner, J.; Bennini, F.; Dötzel, W.: Methods and Tools to Design Microsystems – First International Symposium on Mechatronics (ISOM 2002), Chemnitz (Germany)  – ISBN 3-00-007504-6

Schröter, B.; Frühauf, J.; Mehner, J.; Dötzel, W.; Gessner, T.: Flexible Gelenke in der Silizium-Mikromechanik – First International Symposium on Mechatronics (ISOM 2002), Chemnitz (Germany)  – ISBN 3-00-007504-6

Dötzel, W.; Schröter, B.; Frühauf, J.; Mehner, J.; Gessner, T.: Movable Micromechanical Joints for Use in Micromechatronics – Proceedings, Vol. 1, pp. 4-8 – APEIE, Novosibirsk (Russia)  – ISBN 0-7803-7361-8

Schröter, B.; Frühauf, J.; Mehner, J.; Gessner, T.; Dötzel, W.: Feinwerktechnische Wirkprinzipien in der Mikrosystemtechnik – Proceedings – 47. Internationales Wissenschaftliches Kolloquium, Ilmenau (Germany)  – ISSN 1619-4098

Hanf, M.; Kurth, S.; Faust, W.; Billep, D; Hahn, R.; Heinz, S.; Dötzel, W.; Gessner, T.: Realization of a Hadamard transform optic using a micromirror array for light modulation – Proceedings, pp. 63-66 – OPTO 2002, Erfurt (Germany)

Hanf, M.; Bennini, F.; Frühauf, J.; Gärtner, E; Dötzel, W.: Realization of Electrostatically Driven Actuators Using Curved Electrodes Fabricated Using Silicon Bulk Micromachining Techniques – Proceedings, pp. 329-332 – Actuator, Bremen (Germany)

Scheibner, D.; Wibbeler, J.; Mehner, J.; Brämer, B.; Dötzel, W.; Gessner, T.: Frequency-Selective Silicon Vibration Sensor with Direct Electrostatic Stiffness Modulation – Proceedings, pp. 325-332 – DTIP 2002, Cannes (France), 2002 May 6-8  – ISBN 0-8194-4518-5

Scheibner, D.; Wibbeler, J.; Mehner, J.; Brämer, B.; Dötzel, W.; Gessner, T.: Frequency Selective Sensor Arrays for Vibration Measurement – Proceedings, pp. 675-679 – IEEE Sensors 2002, Orlando (USA), 2002 Jun 11-14  – ISSN 0-7803-7455-X

Scheibner, D.; Wibbeler, J.; Mehner, J.; Dötzel, W.; Gessner, T.: Silicon vibration sensor arrays with electrically tunable band selectivity – Microsystem Technologies, Vol. 8, Issue 4-5, pp. 314-317, 2002 Aug  – DOI/URL: 10.1007/s00542-002-0100-2

Scheibner, D.; Mehner, J.; Brämer, B.; Dötzel, W.; Gessner, T.: Wide Range Tunable Resonators for Vibration Measurements – Proceedings – MNE 2002, Lugano (Switzerland), 2002 Sep 16-19

Bennini, F.; Mehner, J.; Dötzel, W.: Computational Methods for Reduced Order Modeling of Coupled Domain Simulations – Proceedings, pp. 260-263 – Transducers '01 - 11th International Conference on Solid-State Sensors and Actuators, Munich (Germany)

Bennini, F.; Mehner, J.; Dötzel, W.: A Modal Decomposition Technique for Fast Harmonic and Transient Simulations of MEMS – Proceedings, pp. 477-484 – International MEMS Workshop 2001 (IMEMS 2001), Singapore

Wibbeler, J.; Scheibner, D.; Mehner, J.: Improved Coupled- Field FE Analysis of Micromachined Electromechanical Transducers – Proceedings, pp. 240-243 – Transducers '01 - 11th International Conference on Solid-State Sensors and Actuators, Munich (Germany), 2001 Jun 10-14

Kurth, S.; Hiller, K.; Zichner, N.; Mehner, J.; Kaufmann, C.; et al.: A new Vacuum Friction Gauge based on a Si Tuning fork – Proceedings, pp. 502-505 – Transducers '01 - 11th International Conference on Solid-State Sensors and Actuators, Munich (Germany)

Wachutka, G.; Mehner, J.; Schrag, G.; Voigt, P.: Short Course: Design and Simulation of MEMS – Transducers '01 - 11th International Conference on Solid-State Sensors and Actuators, Munich (Germany)

Wibbeler, J.; Mehner, J.; Vogel, F.; Bennini, F.: Development of ANSYS/Multiphysics Modules for MEMS by CAD- FEM GmbH – Intern. Congress on FEM Technology 2001, Potsdam (Germany)

Hanf, M.; Kurth, S.; Faust, W.; Hahn, R.; Heinz, S.; Dötzel, W.; Gessner, T.: Einsatz von Mikrospiegel-Arrays zur Lichtmodulation in einem Hadamard-Transformations-Spektrometer – Proceedings – 5. Chemnitzer Fachtagung Mikrosystemtechnik- Mikromechanik & Mikroelektronik, Chemnitz (Germany)

Löhr, K.; Mehner, J.; Dötzel, W.: Simulation viskoser Dämpfung in Mikrosystemen unter Verwendung von Analogiebeziehungen – Proceedings – 5. Chemnitzer Fachtagung Mikrosystemtechnik- Mikromechanik & Mikroelektronik, Chemnitz (Germany)

Hiller, K.; Kurth, S.; Zichner, N.; Mehner, J.; Kaufmann, C.; Iwert, T.; Biehl, S.; Dötzel, W.; Gessner, T.: Ein mikromechanischer Vakuumsensor nach dem Reibungsprinzip – Proceedings – 5. Chemnitzer Fachtagung Mikrosystemtechnik- Mikromechanik & Mikroelektronik, Chemnitz (Germany)

Scheibner, D.; Mehner, J.; Brämer, B.; Gessner, T.; Dötzel, W.: Abstimmbare Siliziumsensoren zur Vibrationsanalyse mit elektro-magnetischer Selbsttest-Funktionalität – Proceedings, pp. 99-104 – 5. Chemnitzer Fachtagung Mikrosystemtechnik- Mikromechanik & Mikroelektronik, Chemnitz (Germany), 2001 Oct 23-24

Bennini, F.; Mehner, J.; Dötzel, W.: Reduktion nichtlinearer Modelle für Komponenten- und Systemsimulation – Proceedings – 5. Chemnitzer Fachtagung Mikrosystemtechnik- Mikromechanik & Mikroelektronik, Chemnitz (Germany)

Gessner, T.; Kurth, S.; Kaufmann, C.; Markert, J.; Dötzel, W.; Ehrlich,A.: Laser scan systems based on micro mirror units – Proceedings – 8th International Symposium on Microwave and Optical Technology ISMOT 01, Montreal, Quebec (Canada)

Gessner, T.; Kurth, S.; Kaufmann, C.; Markert, J.; DötzelW.: Micromirrors and micromirror arrays for scanning applications – Proceedings, SPIE Vol. 4178, pp. 338-347 – SPIE

Kurth, S.; Hiller, K.; Zichner, N.; Mehner, J.; Iwert, T.; Biehl, S.; Dötzel, W.; Gessner, T.: A micromachined pressure gauge for the vacuum range on damping of a resonator – Proceedings, SPIE Vol. 4559, pp. 103-111 – SPIE - The International Society for Optical Engineering

Hiller, K.; Kurth, S.; Zichner, N.; Gessner, T.; Dötzel, W.; Iwert, T.; Fritsch, H.; Biehl, S.: Bulk micromachined and wafer bonded resonators for vacuum pressure measurement – Proceedings, pp. 285-290 – MST 2001, Düsseldorf (Germany)

Mehner, J.; Scheibner, D.; Wibbeler, J.: Silicon Vibration Sensor Array with Electrically Tunable Band Selectivity – Proceedings, pp. 267-272 – Micro System Technologies, Düsseldorf (Germany), 2001 Mar 27-29

Bennini, F.; Frühauf, J.; Dötzel, W.: High force and large displacement electrostatic actuators with curved electrodes using silicon bulk micromachining – Proceedings – Actuator 2000, Bremen (Germany)

Dötzel, W.; Kaufmann, C.: Silicium-Mikromechanik - neue Technologien für neue Produkte – Lehren und Lernen

Dötzel, W.; Tracey, M.; Sutton, N., Johnstone, I.: A microfluidic based instrument for cytomechanical studies of blood – Proceedings – 1st Annual International IEEE-EMBS Conference on Microtechnologies in Medicine and Biology, Lyon (France), 2000 Oct

Gessner, T.; Kurth, S.; Kaufmann, C.; Markert, J.; Dötzel, W.: Micromirrors and micromirror arrays for scanning applications – Proceedings, SPIE Vol. 4178, paper 35 – SPIE

Gessner, T.; Dötzel, W.; Hiller, K.; Kaufmann, C.; Kurth S.: Mikromechanische Sensoren und Aktoren - Funktionsprinzipien, Technologien und Applikationen – VDI- VDA- GMA Fachtagung Sensoren und Messsysteme 2000, Ludwigsburg (Germany), 2000 Mar

Kurth, S.; Kehr, K.; Faust, W.; Kaufmann, C.; Dötzel, W.; Gessner, T.; Michel, B.: Deformation behavior of micromirror arrays under optical power – Proceedings – International Conference and Exhibition Micro Materials MicroMat, Berlin (Germany)

Löhr, K.; Mehner, J.: Simulation viskoser Dämpfung an Mikrostrukturen – Statusseminar REV-Projekt, München (Germany), 2000 Nov

Mehner, J.; Wibbeler, J.; Bennini, F.; Dötzel, W.: Modeling and Simulation of microelectro-mechnical Components – Proceedings, pp. 163-177 – Workshop on System Design Automation 2000, Rathen (Germany)

Mehner, J.; Kehr, K.; Schröter, B.; Kaufmann, C.; Dötzel, W.; Gessner, T.: A Resonance Method for the Determination of Young's Modulus and Residual Stress of Thin Microstructures – Proceedings – International Conference and Exhibition Micro Materials MicroMat 2000, Berlin (Germany)

Mehner, J.; Gabbay, L.; Senturia, S.D.: Computer- Aided Generation of Nonlinear Reduced- Order Dynamic Macromodels -- I: Non-Stress-Stiffened Case – Journal of Microelectromechanical Systems, pp. 262-269, 2000 Jun

Mehner, J.; Gabbay, L.; Senturia, S.D.: Computer- Aided Generation of Nonlinear Reduced- Order Dynamic Macromodels -- II: Stress-Stiffened Case – Journal of Microelectromechanical Systems, pp. 270-279, 2000 Jun

Mehner, J.; Bennini, F.; Dötzel, W.: Modeling and Simulation of Microelectromechanical Systems – 18th International Congress on FEM Technology, Friedrichshafen (Germany)

Schröter, B.; Mehner, J.; Kaufmann, C.; Dötzel, W.; Gessner ,T.: Elastic Properties of Thin Films Determined by Means of a Resonant Method – Proceedings – Materialsweek 2000, München (Germany)

Mehner, J.; Bennini, F.; Dötzel, W.: CAD for Microelectromechanical Systems – System Design Automation - Fundamentals, Principles, Methods, Examples, pp. 111-132

Wibbeler, J.; Steiniger, C.; Küchler, M; Wolf, K.; Frank, T.; Mehner, J.; Dötzel, W.; Gessner, T.: Resonant Silicon Vibration Sensors with Voltage Controlled Frequency Tuning Capability – Proceedings, 24B3 – Eurosensors XIII, The Hague (The Netherlands), 1999 Sep 12-15

Kehr, K.; Kurth, S.; Mehner, J.; Kaufmann, C.; Hahn, R.; Dötzel, W.; Gessner, T.: Analogously Working Micromirror Arrays – Proceedings, SPIE Vol. 3878-08, pp. 80-89 – SPIE, Santa Clara (USA)

Kurth, S.; Kehr, K.; Mehner, J.; Kaufmann, C.; Hahn, R.; Seidel, R.; Dötzel, W.; Gessner, T.: Syncronously Working Micromirros for Beam Steering-Design and Application Aspects – Proceedings, SPIE Vol. 3787-06, pp. 63-73 – SPIE, Colorado (USA)

Wibbeler, J.; Küchler, M.; Steiniger, C.; Bertz, A.; Wolf, K.; Mehner, J.; Gessner, T.: Resonante Siliziumsensoren mit elektrostatischer Abstimmung für die Vibrationsanalyse – Proceedings, Part 2, pp. 354-359 – 44. Internationales Wissenschaftliches Kolloquium, Ilmenau (Germany), 1999 Sep 20-23

Wibbeler, J.; Steiniger, C.; Wolf, K.; Symanzik, H.; Mehner, J.; Dötzel, W.: Abstimmbare resonante Sensorarrays in oberflächennaher Si-Bulk-Mikromechanik – Proceedings, pp. 5-10 – 4. Chemnitzer Fachtagung Mikrosystemtechnik- Mikromechanik & Mikroelektronik, Chemnitz (Germany), 1999 Oct 11-12

Kurth, S.; Faust, W.; Kehr, K.; Hahn, R.; Kaufmann, C.; Michel, B.; Dötzel, W.: Experimentelle Charakterisierung von Mikrospiegelarrays – Proceedings – 4. Chemnitzer Fachtagung Mikrosystemtechnik- Mikromechanik & Mikroelektronik, Chemnitz (Germany), 1999 Oct 11-12

Kehr, K.; Kurth, S.; Mehner, J.; Dötzel, W.; Gessner, T.: Investigation of Heat Transfer in Micromirrors – SPIE International Symposia on Industrial Lasers and Inspection & Envirosense, München (Germany)

Kehr, K.; Kurth, S.; Mehner, J.; Dötzel, W.; Gessner, T.: Investigation of Heat Transfer in Micromirrors – International Spring Seminar on Electronics 99, Dresden (Germany)

Billep, D.; Zimmermann, S.; Breng, U.; Gutmann, W.; Hafen, M.; Handrich, E.; Leiblich, M.; Ryrko, B.F.; Wetzel, M.; Gessner, T.; Hiller, K.; Wiemer, M.: A Novel Micromachined Silicon Gyro – Symposium Gyro Technology 1998, Universität Stuttgart (Germany)

Dötzel, W.; Tracey, M.; Johnston, I.; Geenaway, R.; Davis, J.; Sutton, N.; Schulze, G.: A microfluidics-based Microcytometer – Interfacing Microfluidics with Macrofluidics, pp. 89-92, Dordrecht 1998  – ISBN 0-7923-5322-6

Dötzel, W.; Gessner, T.; Fujita, H.; Collard, D.: Microactuators for Scanning and other applications – Proceedings, p. 27 – Actuator '98, Bremen (Germany)

Dötzel, W.; Nguyen, N.T.; Richter, S.; Mehner, J.; Schubert, S.; Gessner, T.: Hybrid micro dosing system – Proceedings, SPIE Vol. 3514 – SPIE - Symposium on micromachining and microfabrication, Santa Clara (USA), 1998 Sep

Dötzel, W.; Hühnerfürst, A.; Kehr, K.: Design, technology and material constants of micro mechanical components of silicon – Public SIMIKO - status seminar, Berlin (Germany), 1998 Jun 23

Hiller, K; Wiemer, M.; Billep, D.; Hühnerfürst, A.; Gessner, T .; Ryrko, B.; Breng, U.; Zimmermann, S.; Gutmann, W.; Wetzel, M.: A new bulk micromachined gyroscope with vibration enhancement by coupled resonators – Proceedings, pp. 115-120 – Micro System Technologies '98, Potsdam (Germany)

Kaufmann, C.; Kehr, K.; Kurth, S.; Gessner, T.: Entwicklung mikromechanischer Scannsysteme für Laser TV – Workshop Mikrosystemtechnik - eine Zukunftstechnologie für Sachsen, Dresden (Germany), 1998 Sep 24

Kehr, K.; Hahn, R.; Kurth, S.; Kaufmann, C.; Schmidt, K.; Schubert, I.; Wollmann, U.; Dötzel, W .; Gessner,T.: Technological Approaches to Micromirror Fabrication for High Frequency Scanning Applications – Proceedings, pp. 171-176 – 6th Conference on Micro Electro, Opto, Mechanical Systems and Components, MST 98, Berlin (Germany), 1998 Dec

Kehr, K.; Kaufmann, C.; Hahn, R.; Kurth, S.; Mehner, J.; Wollmann, U.; Dötzel, W.; Gessner, T.: Mikrospiegelarrays für Scan-Frequenzen bis 250 kHz – Proceedings, pp. 47-54 – Fachtagung Informationstechnik und Mikrosystemtechnik, Magdeburg (Germany), 1998 Mar

Kehr, K.; Kurth, S.; Hahn, R.; Kaufmann, C.; Mehner, J.; Dötzel, W.; Gessner, T.: Strip Array for Scanning Applications with Frequencies up to 70 kHz – Proceedings, pp. 47-53 – Actuator '98, Bremen (Germany), 1998 Jun

Kränert, J.; Deter, C.; Gessner, T.; Dötzel, W.: Laser Display Technology – Proceedings, p. 99 – MEMS '98, Heidelberg (Germany), 1998 Jan 25-29

Kurth, S.; Kehr, K.; Mehner, J.; Kaufmann, C.; Dötzel, W.; Gessner, T.: Cross coupling and tolerances in micromirror-arrays and the effect on their application – Proceedings, p. 86 – Actuator '98, Bremen (Germany), 1998 Jun

Kurth, S.; Kaufmann, C.; Dötzel, W.: An Electronic Panorama Projection System – Proceedings, pp. 96-102 – Conference Aplikovana Elektronika '98, Zapodoceska Univerziteta Plzen (Czech Republik)

Mehner, J.; Kurth, S.; Billep, D.; Kaufmann, C.; Kehr, K.; Dötzel, W.: Simulation of Gas Damping in Microstructures with Nontrivial Geometries – Proceedings, pp. 172-177 – MEMS '98, Heidelberg (Germany)

Richter, S.; Nguyen, N.T.; Schubert, S.; Dötzel, W.: Hybrid-assembled micro dosing system using siliconbased micropump/valve and mass flow sensor – Sensors and Actuators A: Physical, Volume 69, pp. 85-91

Wibbeler J .; Pfeifer, G.; Hietschold, M.: Parasitic charging of dielectric surfaces in capacitive microelectromechanical systems (MEMS) – Sensors and Actuators A: Physical, Volume 71, pp. 74-80

Dötzel, W.; Gessner, W.; Kurth, S.: Silicon mirrors and mirror arrays for spatial laser beam modulation – Transducers '97 - 9th International Confererence on Solid-State Sensors and Actuators, Chicago (USA), 1997 Jun 16-19

Griesbach, K.; Bertz, A.; Wolf, K.; Wibbeler, J.; Küchler, M.; Gessner, T.: Single Crystal Silicon Vertical Actuators Based on Surface Micromachining – Proceedings, Vol. 3, pp. 7-11 – SENSOR 97, Nürnberg (Germany), 1997 May 13-15

Gessner, T.; Dötzel, W.; et al.: Silicon mirror arrays by using bulk and surface micromachining – Proceedings, SPIE Vol. 3008-34 – SPIE - Photonics West, San Jose/California (USA), 1997 Feb

Wibbeler, J.; Wolf, K.: Elektrostatische Antriebsvarianten für die Oberflächenmikromechanik – Proceedings, pp. 158-167 – 3. Chemnitzer Fachtagung Mikrosystemtechnik- Mikromechanik & Mikroelektronik, Chemnitz (Germany), 1997 Oct 16-17

Kurth, S.; Dötzel, W.: Experimental Adaptation of Model Parameters for Mikromechanical Systems (MEMS) – Proceedings – Eurosensors X, Leuven (Belgium), 1996 Sep 8-11

Nguyen, N.T.; Bochnia, D.; Kiehnscherf, R.; Dötzel, W.: Investigation of Forced Convection in Micro- Fluid Systems – Sensors and Actuators, Vol. 55

Nguyen, N.T.; Kiehnscherf, R.; Dötzel, W.: Kostengünstige Durchflussmessung mit Mikrosensoren – F&M Feinwerktechnik Mikrotechnik Mikroelektronik, no. 4/96, pp. 250-254

Nguyen, N.T.; Dötzel, W.: Mikromechanische Strömungssensoren im Überblick – F&M Feinwerktechnik Mikrotechnik Mikroelektronik, 9/96, pp. 644-648

Nguyen, N.T.: Konvektionsprobleme in Mikrosystemen – Scientific Reports - Journal of the Mittweida University of Technology and Economics (FH), Vol. 2, pp. 41-50

Billep, D.; Kurth, S.; Symanzik, H.-G.: Entwurf und Charakterisierung eines Spiegelarrays – Kolloquium der Sonderforschungsbereiche 358 und 379, Chemnitz (Germany), 1996 Apr 15th

Billep, D.: Entwurf mikromechanischer Komponenten am Beispiel eines Aktorarrays – Kolloquium des Sonderforschungsbereiches 379, Chemnitz (Germany), 1996 Sep 04-05

Dötzel, W.; Gessner, T.; Billep, D.; Hahn, R.; Kaufmann, C.; Kurth, S.: Design, Technology and Characterisation of a mirror- array in silicon- micromechanics – Proceedings – 5th International Conference on Micro-, Electro-, Opto-, Mechanical Systems and Components, MICRO SY, Potsdam (Germany), 1996 Sep 17-19

Dötzel, W.; Mehner, J.: Simulation and design of silicon sensors and actuators – 10. Deutsch-Japanisches Forum Informationstechnologie, Kloster Seeon (Germany), 1996 Apr 29 - May 03

Dötzel, W.; Billep, D.: Entwurf eines Mikrospiegel-Arrays in Silizium-Mikromechanik – Proceedings, p. 27 – 12. Internationale Konferenz Mittweida, Mittweida (Germany)

Dötzel, W.: Mikrosysteme verändern die Gerätetechnik – VDI-Berichte, Vol. 1282, p. 397 – GMA-Kongress '96, Baden-Baden (Germany)

Dötzel, W.: Micromechanical components for a Blood Cell Analysis Device – Proceedings, Part 2, p. 53 – Internationale Konferenz Aktuelle Probleme des elektronischen Gerätebaues, Nowosibirsk (Russia)

Görlitz, S.; Kiehnscherf, R.; Reiger, R. (Daimler- Benz AG): Werkzeugentwicklung für den Entwurf und die Verwaltung von Silizium- Mikrostrukturen – 4. Workshop, Karlsruhe (Germany), 1996 Nov 18-19

Görlitz, S.; Kiehnscherf, R.; Reiger, R. (Daimler- Benz AG): Softwarewerkzeuge für den Entwurf und die Verwaltung von Silizium- Mikrosystemen – Poster – 4. Workshop, Karlsruhe (Germany), 1996 Nov 18-19

Kehr, K.; Kaufmann, C.; Markert, J.; Rauch, M.: Anzeige- und Prokektionseinrichtungen auf der Basis elektrostatischer Mikroaktoren – Proceedings – 11. Elektronic Displays '96 Konferenz, Chemnitz (Germany), 1996 Apr 24-25

Kehr, K.; Kurth, S.; Wibbeler, J.; Böhm, T.: Regelung elektrostatischer Mikroaktoren mit digitalem Signalprozessor – Workshop mechanisch aktive Systeme, Ilmenau (Germany), 1996 Jul 4-5

Kurth, S.: Parameteradaption an Modellen für kinetische mikromechanische Komponenten aufgrund experimenteller Daten – Workshop Mechanisch aktive Mikrosysteme, Ilmenau (Germany), 1996 Jul 4-5

Kurth, S.: Modellvalidierung und experimentelle Charakterisierung beweglicher Komponenten – Kolloquium des Sonderforschungsbereiches 379 "Mikromechanische Sensor- und Aktorarrays", Chemnitz (Germany), 1996 Nov 04-05

Dötzel, W.; Kehr, K.; Kurth, S.; Wibbeler, J.: Regelung von Mikroaktoren zur Laserstrahlablenkung – Innovationsforum Dresden '96, Dresden (Germany), 1996 Oct 9-10

Kehr, K.; Dötzel, W.: Dynamische Probleme beim Einsatz von mikromechanischen Aktoren für Displayanwendungen – Proceedings – 12. Internationale Mittweidaer Fachtagung, Mittweida (Germany), 1996 Nov 13-15

Nguyen, N.T.; Dötzel, W.: A Novel Method for Designing Multi-Range Electrocaloric Mass Flow Sensors: Asymmetrical Locating with Heater- and Sensor Arrays – Proceedings – Eurosensors X, Leuven (Belgien), 1996 Sep

Markert, J.; Dötzel, W.: Anforderungen an Oberflächen in der Mikromechanik – IX. Internationales Oberflächenkolloquium, Chemnitz (Germany), 1996 Jan 29-31

Mehner, J.; Bertz, A.: Entwurfsprobleme der oberflächennahen Mikromechanik – Kolloquium der Sonderforschungsbereiche 358 und 379, Chemnitz (Germany), 1996 Apr 15th

Mehner, J.; Bertz, A.: Entwurfs-und Technologieprobleme der oberflächennahen Bulkmikromechanik – Kolloquium des Sonderforschungsbereiches 379, Chemnitz (Germany), 1996 Nov 04-05

Dötzel, W.; Markert, J.: Silizium- Mikromechanik für Sensoren und Aktoren – Jahrbuch der Optik, pp. 221-246, Berlin (Germany)

Dötzel, W.; Döhler, R.; Mehner, J.: Entwurf mikromechanischer Systeme – F&M Feinwerktechnik Mikrotechnik Messtechnik, Vol. 103, no. 5/95 pp. 272-276

Dötzel, W.; Billep, D.: Entwurf mikromechanischer Komponenten für Sensor- und Aktorarrays – Mikroelektronik & Mikrosystemtechnik, no. 5 pp. 24-27

Dötzel, W.; Gessner, T.; Kaufmann, C.; Markert, J.; Löwe, H.-U.: Messtechnische Anforderungen bei der Herstellung von Silizium- Mikrospiegeln – Proceedings, pp. 631-636 – Sensor '95, Nürnberg (Germany), 1995 May 9-11

Dötzel, W.; Markert, J.; Mehner, J.; Beconne, J.P.: Simulation statique et modale d'un micro-miroir – Rapport, N°95384, 40 p. – LAAS, Toulouse (France), 1995 Sep

Nguyen, N. T.; Kiehnscherf, R.: Low cost silicon sensors for mass flow measurement of liquids and gases – Sensors and Actuators, Volume 49/1-2, pp. 17-20

Büttner, K.: Einsatz des 2- Punkt- Faservibrometers OFV 502 in der Mikromechanik – Seminartagungsband – Anwenderseminar Fa. Polytec, Waldbronn (Germany), 1994 Jun 14-15

Dötzel, W.; Mehner, J.: EMECH, Electo-mechanical Simulation in Microtechnology – Mico System Technologies '94, Berlin (Germany), 1994 Oct 19-21

Dötzel, W.; Müller, D.; Mehner, J.: Elektrostatische Wirkprinzipien in der Mikrosystemtechnik – Mikroelektronik & Mikrosystemtechnik, no. 6

Dötzel, W.; Döhler, R.; Mehner, J.: Mikromechanik- Komponenten und deren Beschreibung im Mikrosystementwurf – VDI-Schriftreihe "Inovationen in der Mikrosystemtechnik", Band 14, Berlin (Germany)

Kiehnscherf, R.; Nguyen, N. T.; Schulze, M.: Elektrokalorischer Durchflussmengensensor für Gase und Öle – F&M Feinwerktechnik Mikrotechnik Messtechnik, no. 9/94

Kurth, S.: Beweglichen mikromechanischen Elementen auf der Spur – F&M Feinwerktechnik Mikrotechnik Messtechnik, no. 11-12/94

Markert, J.; Gessner,T.; Löwe, U.: Mikromechanische Scansysteme - eine Produktentwicklung innerhalb eines Dienstleistungszentrums – Tagungsbericht Dienstleister in der Mikrosystemtechnik, Bd. 17 – Mikrosystem Technologies

Mehner, J.: Mechanische Beanspruchungsanalyse von Si-Elementen – Kongress-Dokumentation, Tutorial 2 – Internationaler Kongreß SMT, ASIC und Hybrid, Nürnberg (Germany), 1994 May 17-19

Dötzel, W.: Mikromechanische Sensoren und Aktoren nach dem elektrostatischen Prinzip – Tagungsband – Internationale Konferenz "Aktuelle Probleme des elektronischen Gerätebaues", TU Nowosibirsk (Russia)

Dötzel, W.: Silizium als Konstruktionswerkstoff für mikromechanische Komponenten – Gründungsveranstaltung des Arbeitskreises Mikrosystemtechnik im Deutschen Verband für Materialfors, Berlin (Germany), 1994 Oct 10th