| Almeida,M.; Goetze,T.; Ueberschaer,O.; Matthes,P.; Mueller,M.; Ecke,R.; Exner,H.; Schulz,S.E.: Monolithic integration of 2D spin valve magnetic field sensors for angular sensing. Nanofis 2014, Graz (Austria), 2014 Dec 3-5; Materials Today: Proceedings (accepted) |
| Blaudeck,T.; Adner,David; Hermann,S.; Schulz,S.E.; Lang,Heinrich; Gessner,T.: Wafer-Level Functionalization of Integrated Carbon Nanotubes with Metal Nanoparticles. Materials for Advanced Metallization (MAM) 2014, Chemnitz, Mar 02-05, 2014; Proceedings |
| Blaudeck,T.; Adner,David; Hermann,S.; Zhang,Youwei; Schulz,S.E.; Liu,Ran; Lang,Heinrich; Gessner,T.: Wafer-Level Functionalization of Carbon Nanomaterials with Metal Nanoparticles. DPG-Frühjahrstagung, Dresden, Mar 30 - Apr 04, 2014; Verhandlungen (ISSN 0420-0195) |
| Blaudeck,T.; Kasper,Laura; Adner,David; Bayat,Parisa; Hermann,S.; Kalbacova,Jana; Rodriguez,Raul D.; Lang,Heinrich; Zahn,Dietrich R.T.; Schulz,S.E.: Nanometallization of Arrays of Carbon Nanotube Field-Effect Transistors Using a Wafer-Level Stop-and-Go Microfluidic Approach. MRS Fall Meeting 2014, Boston, MA (USA), 2014 Dec 1-5 |
| Boettger,S.; Hermann,S.; Schulz,S.E.: Towards waferlevel fabricated CNT sensors – Process improvements by length separation of single-walled carbon nanotubes. Trends in Nanotechnology, Barcelona, 2014 Oct 27-31; Proceedings, pp 48-49 |
| Dhakal,D.; Waechtler,T.; Mothes,R.; Schulz,S.E.; Lang,H.; Gessner,T.: In-situ XPS investigation of the surface chemistry of a Cu(I) beta-diketonate precursor and the ALD of Cu2O. Materials for Advanced Metallization (MAM 2014) Conference, Chemnitz (Germany), 2014 March 2-5 |
| Dhakal,D.; Waechtler,T.; Schulz,S.E.; Gessner,T.; Lang,H.; Mothes,R.; Tuchscherer,A.: Surface chemistry of a Cu(I) beta-diketonate precursor and the atomic layer deposition of Cu2O on SiO2 studied by x-ray photoelectron spectroscopy. Journal of Vacuum Science and Technology A, 32 (2014) pp 0415051-0415059 |
| Dhakal,D.; Waechtler,T.; Schulz,S.E.; Moeckel,S.; Lang,H.; Gessner,T.: In-situ growth monitoring of ultrathin films of ALD Cu2O and Cu after successive reduction. 2nd International Conference on ALD Applications & 3rd China ALD conference, Shanghai (China), 2014 Oct 16-17 |
| Dhakal,D.; Waechtler,T.; Schulz,S.E.; Mothes,R.; Moeckel,S.; Lang,H.; Gessner,T.: In-situ XPS Investigation of ALD Cu2O and Cu Thin Films after Successive Reduction. 14th International Conference on Atomic Layer Deposition (ALD 2014), Kyoto (Japan), 2014 June 15-18 |
| Fiedler,H.; Hermann,S.; Rennau,M.; Schulz,S.E.; Gessner,T.: Localization length of integrated multi-walled carbon nanotubes. 2014 IEEE International Interconnect Technology Conference / Advanced Metallization Conference (IITC/AMC), San Jose, 2014 May 20-23; Proceedings, pp 159-162 |
| Fiedler,H.; Toader,M.; Hermann,S.; Rodriguez,R.D.; Evegniya,S.; Rennau,M.; Schulze,S.; Waechtler,T.; Zahn,D.R.T.; Hietschold,M.; Schulz,S.E.; Gessner,T.: Carbon nanotube based via interconnects: Performance estimation based on the resistance of individual carbon nanotubes. Microelectronic Engineering, 120 (2014) pp 210-215 |
| Fiedler,H.; Toader,Marius; Hermann,S.; Rennau,M.; Rodriguez,Raul D.; Sheremet,E.; Zahn,Dietrich R.T.; Hietschold,Michael; Schulz,S.E.; Gessner,T.: Interface Resistance of Carbon-Nanotube-Based Interconnects. Materials for Advanced Metallization (MAM) 2014, Chemnitz, Mar 02-05, 2014; Proceedings |
| Fuchs,F.; Zienert,A.; Wagner,C.; Schuster,J.; Schulz,S.E.: Interaction Between Carbon Nanotubes and Metals: Electronic Properties, Stability, and Sensing. MAM, Chemnitz (Germany), 2014 Mar 2-5; Talk |
| Fuchs,F.; Zienert,A.; Wagner,C.; Schuster,J.; Schulz,S.E.: Interaction Between Semiconducting Carbon Nanotubes and Metals: Sensing, Stability and Electronic Properties. Materials for Advanced Metallization (MAM), 2014 Mar 02-05; Proceedings |
| Georgi,C.; Hildebrandt,T.; Waechtler,T.; Schulz,S.E.; Gessner,T.; Lang,H.: A cobalt layer deposition study: Dicobaltatetrahedranes as convenient MOCVD
precursor systems. J. Mater. Chem. C, 2, 23 (2014) pp 4676-4682 (ISSN 2050-7534) |
| Hartmann,Martin; Hermann,S.; Schulz,S.E.: Characterization of integrated single-walled carbon nanotubes by transmission electron microscopy. DPG-Frühjahrstagung, Dresden, Mar 30 - Apr 04, 2014; Verhandlungen (ISSN 0420-0195) |
| Hartmann,Steffen; Blaudeck,T.; Hoelck,Ole; Hermann,S.; Schulz,S.E.; Gessner,T.; Wunderle,B.: Quantitative in-situ scanning electron microscope pull-out experiments and molecular dynamics simulations of carbon nanotubes embedded in palladium. Journal of Applied Physics, 115, 14 (2014) p 144301 |
| Hartmann,Steffen; Hoelck,Ole; Blaudeck,T.; Hermann,S.; Schulz,S.E.; Gessner,T.; Wunderle,B.: Molecular dynamic simulations of maximum pull-out forces of embedded CNTs for sensor applications and validating nano scale experiments . 15th IEEE International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE), Gent (Belgium), Apr 07-09, 2014; Proceedings |
| Hartmann,Steffen; Hoelck,Ole; Hermann,S.; Blaudeck,T.; Schulz,S.E.; Gessner,T.; Wunderle,B.: Nanomechanics of carbon nanotube-metal contacts investigated by molecular dynamics and validating experiments. DPG-Frühjahrstagung, Dresden, Mar 30 - Apr 04, 2014; Verhandlungen (ISSN 0420-0195) |
| Hermann,S.; Boettger,Simon; Bonitz,J.; Shaporin,Alexey; Hartmann,Steffen; Hartmann,Martin; Tittmann-Otto,Jana; Blaudeck,T.; Kalbacova,Jana; Rodriguez,Raul D.; Zahn,Dietrich R.T.; Wunderle,B.; Mehner,J.; Schulz,S.E.; Gessner,T.: Integration and Functionalization of Carbon Nanotubes at the Wafer Level for Sensor Applications. MRS Fall Meeting 2014, Boston, MA (USA), 2014 Dec 1-5 |
| Hermann,S.; Shaporin,Alexey; Bonitz,J.; Hartmann,Steffen; Kalbacova,Jana; Rodriguez,Raul D.; Zahn,Dietrich R.T.; Mehner,J.; Wunderle,B.; Schulz,S.E.; Gessner,T.: Carbon nanotubes for piezoresistive electro-mechanical transducers incorporating a wafer-level technology. DPG-Frühjahrstagung, Dresden, Mar 30 - Apr 04, 2014; Verhandlungen (ISSN 0420-0195) |
| Hille,Toni; Blaudeck,T.; Hermann,S.; Deibel,Carsten; Schulz,S.E.: Spectroscopic Monitoring of Dispersion Preparation for Aligned Deposition of Single-Walled Carbon Nanotubes at the Wafer Level. MRS Fall Meeting 2014, Boston, MA (USA), 2014 Dec 1-5 |
| Hille,Toni; Blaudeck,T.; Hermann,S.; Schulz,S.E.: Dispersion Preparation for Wafer-Level Liquid Processing of Carbon Nanotube Microsensors. 12. Chemnitzer Fachtagung Mikrosystemtechnik, Chemnitz, Oct 21-22, 2014; Proceedings (ISBN 978-3-00-047625-9) |
| Hille,Toni; Blaudeck,T.; Hermann,S.; von Borczyskowski,Christian; Schulz,S.E.: Spectroscopic Monitoring of Carbon Nanotube Dispersion Preparation. DPG-Frühjahrstagung, Dresden , Mar 30 - Apr 04, 2014; Verhandlungen (ISSN 0420-0195) |
| Hu,X.; Schuster,J.; Schulz,S.E.; Gessner,T.: Mechanism for the atomic layer deposition (ALD) of copper oxide from (nBu3P)2Cu(acac) and wet O2: a theoretical study. 14th International Conference on Atomic Layer Deposition, Kyoto (Japan), June 15-18 |
| Hu,X.; Schuster,J.; Schulz,S.E.; Gessner,T.: Simulation of ALD chemistry of copper metalorganic precursors on Ta(110) Surface. Materials for Advanced Metallization (MAM 2014), Chemnitz (Germany), March 2-5 |
| Hu,X.; Schuster,J.; Schulz,S.E.; Gessner,T.: Thermodynamics and Kinetics of Cu2O ALD from Cu(I) Acetylacetonate. 2nd International Conference on ALD Applications & 3rd China ALD conference, Shanghai (China), Oct 16-17 |
| Kalbacova,Jana; Rodriguez,Raul D.; Blaudeck,T.; Hermann,S.; Sheremet,E.; Adner,David; Lang,Heinrich; Schulz,S.E.; Zahn,Dietrich R.T.: Raman spectroscopy study of the interaction of gold nanoparticles with carbon-nanotubefield-effect transistors. 12. Chemnitzer Fachtagung Mikrosystemtechnik, Chemnitz, Oct 21-22, 2014; Proceedings (ISBN 978-3-00-047625-9) |
| Kalbacova,Jana; Rodriguez,Raul D.; Blaudeck,T.; Hermann,S.; Sheremet,E.; Adner,David; Lang,Heinrich; Schulz,S.E.; Zahn,Dietrich R.T.: A Raman Spectroscopy Study of the Interaction of Gold Nanoparticles with a Wafer-Level Integrated Carbon Nanotube Field Effect Transistor. 17th International Conference on Solid Films and Surfaces (ICSFS-17), Rio de Janeiro, Sep 08-11, 2014; Proceedings |
| Rodriguez,Raul D.; Kalbacova,Jana; Blaudeck,T.; Hermann,S.; Bayat,Parisa; Adner,David; Lang,Heinrich; Schulz,S.E.; Zahn,Dietrich R.T.: Interaction of gold nanoparticles with wafer-level integrated carbon nanotubes probed by Raman spectroscopy. DPG-Frühjahrstagung, Dresden, Mar 30 - Apr 04, 2014; Verhandlungen (ISSN 0420-0195) |
| Sheremet,E.; Rodriguez,Raul D.; Krayev,A.; Kalbacova,Jana; Hermann,S.; Schulz,S.E.; Zahn,Dietrich R.T.: Tip-Enhanced Raman Spectroscopy for the Characterization of Carbon Nanotubes. 12. Chemnitzer Fachtagung Mikrosystemtechnik, Chemnitz, Oct 21-22, 2014; Proceedings (ISBN 978-3-00-047625-9) |
| Singh,P.K.; Zimmermann,S.; Waechtler,T.; Schulze,Steffen; Schulz,S.E.; Hietschold,Michael: Sidewall Damage Analysis of Low-k Dielectricmaterial by Using Energy-Filtered Transmission Electron Microscopy. Materials for Advanced Metallization (MAM) 2014, Chemnitz, Mar 02-05, 2014; Proceedings |
| Tittmann,J.; Fiedler,H.; Adner,D.; Hermann,S.; Schulz,S.E.; Gessner,T.: Wafer-level integration of carbon nanotubes for high-frequency field-effect transistors. The Tenth International Nanotechnology Conference on Communication and Cooperation (INC10), Gaithersburg, Maryland, May 13-15; Poster |
| Tittmann,J.; Hermann,S.; Schulz,S.E.; Pacheco-Sanchez,A.; Claus,M.; Schroeter,M.: Hysteresis-free carbon nanotube field-effect transistors without passivation. IEEE/ACM International Symposium on Nanoscale Architectures (NANOARCH), Paris, July 8-10; Proceedings, pp 137-138 |
| Ueberschaer,O.; Almeida,M.J.; Matthes,P.; Ecke,R.; Schulz,S.E.; Gessner,T.: Innovative 2D GMR magnetic field sensors in monolithic integration for high-sensitivity applications. Applied Materials Customer Technology Symposium, Dresden (Germany), 2014 May 22; Talk |
| Ueberschaer,O.; Almeida,M.J.; Matthes,P.; Ecke,R.; Schulz,S.E.; Gessner,T.: Monolithisch hergestellte 2D-GMR-Magnetfeldsensoren für hochsensitive Kompassanwendungen. 12. Mikrotechnologietagung, Chemnitz (Germany), 2014 Oct 21-22; Talk |
| Ueberschaer,O.; Schulz,S.E.: Micro-Magnetofluidics: A Powerful Tool for Medical Lab-on-a-chip Applications. COMPAMED High-Tech Forum by IVAM / MEDICA, Düsseldorf (Germany), 2014 Nov 12-14; Talk |
| Waechtler,T.; Sharma,A.; Ahner,N.; Melzer,M.; Mueller,S.; Lehmann,D.; Schaefer,P.; Schulze,S.; Schulz,S.E.; Zahn,D.R.T.; Hietschold,M.; Gessner,T.: ALD of Nickel Oxide and its Reduction to Nickel for Potential
Applications in Interconnects and Spintronics. MAM - Materials for Advanced Metallization, Chemnitz (Germany), 2014 Mar 2-5 |
