| Alves da Silva,L; Boettger,S.; Hartmann,M.; Hermann,S.: Investigation of the electrical response of a carbon nanotube-based biosensor for the specific detection of nucleic acids. MNE EUROSENSORS 2022, Leuven (Belgium), 2022 Sep 19-23; ORAL TALK |
| Alves da Silva,L; Hermann,S.: Nanomaterial based Electronic Biosensors: Status and Prospects. COPAMED 2022 - CONFERENCE FOR HIGH TECH SOLUTIONS ON MEDICAL TECHNOLOGY, 2022 Nov 14; ORAL TALK |
| Alves da Silva,L; Rau,S; Kuhlmeier,D; Hermann,S.: Development of a carbon nanotube based sensor array platform for specific detection of nucleic acids. 7th International Conference on Bio-Sensing Technology, Sitges - Barcelona, Spain, 2022 Jul 26-29; POSTER PRESENTATION |
| Bickmann,C.; Meinecke,C.; Korten,T.; Heldt.G.; Hartmann,S.; Helke,C.; Reuter,D; Schulz,S.E.: Integration von thermosensitiven Polymeren in nanoskalige Kanäle zur Realisierung von mikrofluidischen Schaltungen. 15. Chemnitzer Fachtagung Mikromechanik & Mikroelektronik, Chemnitz (Germany), 2022 Nov 9-10; Proceedings (ISBN 978-3-00-073342-0) |
| Boettger,S.; Hartmann,M.; Dahra Nipun; Kaulfersch,E.; Hermann,S.: Stress-configurable and suspended nanodevices for post-CMOS multifunctionality. MNE Eurosensors, Leuven (Belgium), 2022 Sep 19-23 |
| Buelz,D.; Forke,R.; Hiller,K.; Weidlich,S.; Hahn,S.; Shaporin,A.; Wuensch,D.; Konietzka,S.; Motl,T.; Billep,D.; Kuhn,H.: Nordsuche – Performance Demonstration für Präzisions-MEMS-Gyroskope. 15. Chemnitzer Fachtagung Mikromechanik & Mikroelektronik, Chemnitz (Germany), 2022 Nov 9-10; Proceedings (ISBN 978-3-00-073342-0) |
| Canpolat-Schmidt,C.H.; Heldt,G.; Helke,C.; Voigt,A.; Reuter,D.: Lithographic performance of resist ma-N 1402 in an e-beam/i-line stepper intra-level mix and match approach. 37th European Mask and Lithography Conference (EMLC), Leuven (Belgium), 2022 Jun 20-22; Proc. SPIE 12472, pp 1-9 |
| Forke,R.; Hiller,K.; Hahn,S.; Shaporin,A.; Weidlich,S.; Buelz,D.; Kuechler,M.; Reuter,D.; Helke,C.; Wuensch,D.; Gottfried,K.; Kuhn,H.: The BDRIE-HS* Technology Approach for Tiny Motion Detection with Improved Sensitivity and Noise Performance. 2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL), Avignon (France), 2022 May 8-11; Proceedings, pp 1-4 (ISBN 9781665402828) |
| Goran Bijelic; Nerea Briz Iceta; Čedomir Stefanović; Morschhauser,A.; Ana Belén Carballo Leyenda; Lucas Paletta; Andreas Falk; MilošKostić; Matija Strbac; Nikola Jorgovanovic; Gerhard Jobst; Rita Paradiso; Giovanni Magenes; Pablo Fanjul Bolado; et.al: SixthSense: Smart Integrated Extreme Environment Health Monitor with Sensory Feedback for Enhanced Situation Awareness. IEEE-EMBS International Conference on Wearable and Implantable Body Sensor Networks (BSN), Ioannina, Greece, 27-30.0.2022; Proceedings |
| Helke,C.; Arnold,M.; Schwenzer,G.; Gossler,C.; Reinhardt,M.; Wachs,M.; Keppeler,D.; Moser,T.; Schwarz,U.T.; Reuter,D.; Kuhn,H.: Flexible photopolymer based optical waveguides for optogenetic applications. 65th Electron, Ion and Photon Beam Technology and Nanofabrication (EIPBN - 3 Beams), New Orleans (USA), 2022 May 31- Jun 3; Proceedings, pp 1-2 |
| Helke,C.; Canpolat-Schmidt,C.H.; Heldt,G.; Schermer,S.; Voigt,A.; Reuter,D.: Intra-level Mix and Match Approach of Resist ma-N 1402 for E-beam and i-line
Stepper Lithography and Structures below the CD. MNE EUROSENSORS 2022, Leuven (Belgium), 2022 Sep 19-23; Proceedings, pp 1-2 |
| Helke,C.; Haase,M.; Reuter,D.; Zorbach,W.; Kneidinger,A.; Kuhn,H.: Fabrication of Nanoimprint-Lithography masters for optical nano gratings. 2022 Smart Systems Integration (SSI), Grenoble (France), 2022 Apr 27-28; Proceedings (ISBN 978-1-6654-8849-5, 978-1-6654-8850-1) |
| Helke,C.; Haase,M.; Zorbach,W.; Reuter,D.; Kuhn,H.: Fabrication of Nanoimprint-Lithography masters for optical nano gratings. 65th Electron, Ion and Photon Beam Technology and Nanofabrication (EIPBN - 3 Beams), New Orleans (USA), 2022 May 31- Jun 3; Proceedings, pp 1-2 |
| Hermann,S.; Boettger,S.; Pankenin,E.: Stresskonfigurierbare nanoelektronische Bauelementstruktur sowie Zwischenprodukt
und Verfahren zur Herstellung einer nanoelektronischen Bauelementstruktur. 10 2021 112 863.3 |
| Hu,X.; Schuster,J.: Chemical Mechanism of AlF3 Etching during AlMe3 Exposure: A Thermodynamic and DFT Study. The Journal of Physical Chemistry C, 126, 17 (2022) pp 7410-7420 |
| Johrmann,Nathanael; Stoeckel,C.; Wunderle,B.: Accelerated Stress Testing for High-Cycle Fatigue of thin Al Films on piezo-driven MEMS Cantilever. THERMINIC 2022 - 28th International Workshop on Thermal Investigations of ICs and Systems, Proceedings, Dublin (Ireland), 2022 September 28-30; Proceedings |
| Kolas,K.; Boehme,M.; Albrecht,J.; Rzepka,S.: Parametrically Generated FE Models for the Design for Reliability of Classical and Embedded Power Modules. 2022 Smart Systems Integration (SSI), Grenoble (France), 2022 Apr 27-28; Proceedings (ISBN 978-1-6654-8849-5, 978-1-6654-8850-1) |
| Kuenzel,P.; Schwarz,U.; Voigt,S.; Weidlich,S.; Ziegenhardt,R.; Forke,R.; Kuhn,H.: Erhöhung des Aspektverhältnisses der industriellen XMB10-Technologie durch nachträgliche Reduktion des Elektrodenspalts mittels Zustellen und Verschweißen. 15. Chemnitzer Fachtagung Mikromechanik & Mikroelektronik, Chemnitz (Germany), 2022 Nov 9-10; Proceedings (ISBN 978-3-00-073342-0) |
| Lange,S.; Hedayat,C.; Kuhn,H.; Hilleringman,U.: Modeling and Characterization of a 3D Environment for the Design of an Inductively Based Locating Method by Coil Couplings. 2022 Smart Systems Integration (SSI), Grenoble (France), 2022 Apr 27-28; Proceedings (ISBN 978-1-6654-8849-5, 978-1-6654-8850-1) |
| Manoharan,G.; Willert,A.; Kuhn,E.; Roehlig,D.; Thraenhardt,A.; Otto,T.; Blaudeck,T.: Mikroreflexionsspektroskopie – die Nahordnung gedruckter Nanostrukturen im Visier. GIT-Laborfachzeitschrift, 66, 11 (2022) pp 29-31 (ISSN 0016-3538) |
| Miraglia,M.; Tannous,M.; Inglese,F.; Braemer,B.; Milazzo,M.; Stefanini,C.: Energierückgewinnung aus Stoßdämpfern durch eine neuartige kompakte elektro-hydraulische Systemarchitektur. Mechatronics, 81 (2022) p 102701 (ISSN 0957-4158) |
| Moeller,H.; Dudek,R.; Otto,A.; Rzepka,S.: Building reliable FE simulation models for a better behavior prediction of power electronic systems, Projekte: Ultimate GaN, Power2Power. 2022 IEEE Intersociety Conference on Thermal and Thermomechanical Phenomena in Electronic Systems – iTherm, San Diego, CA (USA), 2022 May 31–June 3; Proceedings (ISBN 978-1-6654-8503-6, 978-1-6654-8502-9, 978-1-6654-8504-3, 2694-2135, 1936-3958) |
| Mutschall,D.; Kaiser,A.; Lehmkau,R.; Ebermann,M.; Neumann,N.; Mart,C.; Esslinger,S.; Neuber,M.; Weinreich,W.; Hiller,K.; Seiler,J.; Grossmann,T.D.; Shaporin,A.: Mikromechanisch strukturierter, CMOS-kompatibler pyroelektrischer Detektor auf der Basis von dotiertem HfO2 in Trenchzellen. MikroSystemTechnik Kongress, Stuttgart-Ludwigsburg (Deutschland), 2021 Nov 08.-10. (ISSN 1742-6596) |
| Pan,Y.; Rahaman,M.; He,L.; Milekhin,I.; Manoharan,G.; Aslam,M.A.; Blaudeck,T.; Willert,A.; Matković,A.; Madeira,T.I.; Zacher,M.: Exciton tuning in monolayer WSe2via substrate induced electron doping. Nanoscale Advances (ISSN 2516-0230) |
| Pregl,S.; Landgraf,E.; Koehler,D.; Bieselt,A.; Hengst,C.; Meinhold,D.; Dahl,C.; Shaporin,A.; Weidlich,S.; Wuensch,D.; Hahn,S.; Forke,R.; Hiller,K.; Kuhn,H.: High-G Acceleration Sensors for the Automotive Industry. 2022 Smart Systems Integration (SSI), Grenoble (France), 2022 Apr 27-28; Proceedings (ISBN 978-1-6654-8849-5, 978-1-6654-8850-1) |
| Reuther,C.; Santos-Otto,P.; Grover,R.; Heldt,G.; Woehlke,G.; Diez,S.: Nanoletters, 22, 3 (2022) pp 926-934 |
| Reuther,G.M.; Albrecht,J.; Dudek,R.; Rzepka,S.: Determining adhesion of critical interfaces in microelectronics – A reverse Finite Element Modelling approach based on nanoindentation
. Microelectronics Reliability, 133, 114530 (2022) (ISSN 0026-2714) |
| Roehlig,D.; Kuhn,E.; Thranhardt,A.; Otto,T.; Blaudeck,T.: The Role of Disorder in Elementary Photonic Components. 2022 Smart Systems Integration (SSI), Grenoble (France), 2022 Apr 27-28; 2022 Smart Systems Integration (SSI), Proceedings (ISBN 978-166548849-5, 978-1-6654-8850-1) |
| Saeidi,N.; Selvam,K.; Tortato,F.; Wiemer,M.; Kuhn,H.: High Precision Liquid Level and Leak Detection Based on Capacitive Micromachined Ultrasound Transducer. 2022 Smart Systems Integration (SSI), Grenoble (France), 2022 Apr 27-28; Proceedings (ISBN 978-1-6654-8849-5, 978-1-6654-8850-1) |
| Schermer,S.; Helke,C.; Song,D.; Haase,M.; Zorbach,W.; Kneidinger,A.; Reuter,D.; Kuhn,H.: Hochauflösende Projektions-Lithografie für die Herstellung von MEMS-Strukturen mit hohem Aspekt-Verhältnis und für Nano-Imprint-Lithografie Mastern für optische Gitter. 15. Chemnitzer Fachtagung Mikromechanik & Mikroelektronik, Chemnitz (Germany), 2022 Nov 9-10; Proceedings (ISBN 978-3-00-073342-0) |
| Schermer,S.; Helke,C.; Song,D.; Reuter,D.; Kuhn,H.: High-resolution projection lithography for MEMS-applications using thick photoresist AZ 10XT. 2022 Smart Systems Integration (SSI), Grenoble (France), 2022 Apr 27-28; Proceedings (ISBN 978-1-6654-8849-5, 978-1-6654-8850-1) |
| Schlagmann,M.; Selbmann,F.; Haubold,M.; Vobl,M.; Otto,T.: Miniaturized and Highly Integrated Humidity Sensor with Biocompatible Sensing Material for Smart Farming. 2022 Smart Systems Integration SSI, Grenoble (France), 2022 Apr 27-28; Proceedings (ISBN 978-166548849-5, 978-1-6654-8850-1) |
| Schott,C.; Meinel,K.; Mayer,F.; Gupta,D.; Mittag,S.; Hahn,S.; Weidlich,S.; Buelz,D.; Forke,R.; Hiller,K.; Kuhn,H.; Heinkel,U.: MEMS-basierte Fingerprint-Architektur für Vertrauenswürdige Elektronik. 15. Chemnitzer Fachtagung Mikromechanik & Mikroelektronik, Chemnitz (Germany), 2022 Nov 9-10; Proceedings (ISBN 978-3-00-073342-0) |
| Schroeder,D.; Hedayat,C.; Hilleringmann,U.; Kuhn,H.: Nahfeldmesstechnik zur Designoptimierung und Bewertung von IoT-Komponenten. Jahreskolloqium 2022 Kommunikation in der Automation, Lemgo (Germany), 2022 Nov 3; Proceedings/Talk |
| Seifert,T.; Roscher,F.; K.Hoefer; Wiemer,M.; Hiller,K.; H.Kuhn: Nanolot - gradierte Nanoverbundwerkstoffe mit funktionsorientierten Eigenschaften zur Verarbeitung mit additiven Fertigungstechnologien. #additivefertigung: Metall in bestForm , Essen (Deutschland), 2022 Oct 28; DVS Berichte, 383 (2022) pp 69-79 (ISBN 978-3-96144-202-7 ) |
| Stoeckel,C.; Meinel,K.; Melzer,M.; Žukauskaitė,A.; Zimmermann,S.; Forke,R.; Hiller,K.; Kuhn,H.: Static High Voltage Actuation of Piezoelectric AlN and AlScN Based Scanning Micromirrors
. Micromachines, 13, 4 (2022) p 625 |
| Stoeckel,C.; Shaporin,A.; Schaller,F.; Melzer,M.; Forke,R.; Zimmermann,S.: Passive, frequency-selective piezoelectric MEMS with wake-up electronics for ultra-low-power vibration sensors. EASS 2022 pp 1-3 |
| Streit,P.; Forke,R.; Voigt,S.; Schwarz,U.; Ziegenhardt,R.; Weidlich,S.; Billep,D.; Gaitzsch,M.; Kuhn,H.: Vibration sensors with a high bandwidth and low SNR, enhanced with post processing gap
reduction. 23rd International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE), St Julian, Malta , 25-27 April 2022; Proceedings, pp 1-7 |
| Surendiran,P.; Meinecke,C.; Salhotra,A.; Heldt,G.; Zhu,J.; Mansson,A.; Diez,S.; Reuter,D.; Kugler,H.; Linke,H.; Korten,T.: Solving Exact Cover Instances with Molecular-Motor-Powered Network-Based Biocomputation. ACS Nanoscience Au, 2, 5 (2022) pp 396-403 |
| Wecker,J.; Hiller,K.; Grossmann,T.D.; Kurth,S.; Hahn,S.; Saupe,R.; Martin,J.; Weiss,A.; Kuhn,H.: Multi-Mode Silicon Waveguides at Long Infrared Wavelengths. 2022 Smart Systems Integration (SSI), Grenoble (France), 2022 Apr 27-28; Proceedings (ISBN 978-1-6654-8849-5, 978-1-6654-8850-1) |
| Weidlich,S.; Forke,R.; Hiller,K.; Buelz,D.; Shaporin,A.; Kuhn,H.: Modular Probecard-Measurement Equipment for Automated Wafer-Level Characterization of High Precision MEMS Gyroscopes. 2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL), Avignon, 2022 May 8-11; Proceedings, pp 1-4 (ISBN 9781665402828) |
| Zenkevich,E.I.; Blaudeck,T.; Sheinin,V.B.; Selyshchev,O.N.; Kulikova,O.M.; Stroyuk,O.L.; Raievska,O.E.; Dzhagan,V.N.; Koifman,O.I.; von Borczyskowski,C.; Zahn,D.R.T.: Energy Transfer and Singlet Oxygen Generation in Semiconductor Quantum Dot Porphyrin Nanoassemblies. Molecular, Membrane and Cellular Foundations for the Functionality of Biosystems, International Scientific Conference of the 15th General Assembly of the Belarusian Society of Photobiologists and Biophysicists, Minsk (Belarus), 2022 Jun 15-17; Proceedings, 2022 (2022) p 156 |
| Zhu,J.; Salhotra,A.; Meinecke,C.; Surendiran,P.; Lyttleton,R.; Reuter,D.; Kugler,H.; Diez,S.; Mansson,A.; Linke,H.; Korten,T.: Solving the 3-SAT problem using network-based biocomputation. arXiv - Online resource |
