Publikationen
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Jahr 2016
| Boettger,S.; Hermann,S.; Schulz,S.E.; Gessner,T.: Length separation of single-walled carbon nanotubes and its impact on structural and electrical properties of wafer-level fabricated carbon nanotube-field-effect transistors. Nanotechnology, 27 (2016) p 435203 |
| Boettger,S.; Schulz,S.E.; Hermann,S.: Chain-less CNT-FETs for a competitive wafer-level sensor technology. NT2016, Vienna, 2016 Aug 7-13; Conference Proceedings, p 48 |
| Boettger,S.; Schulz,S.E.; Hermann,S.: Exploitation of giant piezoresistivity – CNT sensors fabricated with a wafer-level technology. EUROSENSORS, Budapest, 2016 Sep 4-7 |
| Bonitz,J.; Boettger,S.; Hermann,S.; Hartmann,S.; Schulz,S.E.; Wunderle,B.; Gessner,T.: Wafer-level technology for integration of carbon nanotubes into micro-electro-mechanical systems. Conference on Nano/Micro Engineered and Molecular Systems (NEMS), Matsushima Bay and Sendai MEMS City, Japan, 17-20 April, 2016, 17-20 April 2016; Nano/Micro Engineered and Molecular Systems (NEMS), 2016 IEEE 11th Annual International Conference on (ISBN 978-1-5090-1947-2 ) |
| Brunschwiler,T.; Zuercher,J.; Zimmermann,S.; Burg,B.R.; Schlottig,G.; Chen,X.; Sinha,T.; Straessle,R.; Baum,M.; Hofmann,C.; Pantou,R.; Aachen,A.; Zschenderlein,U.; Wunderle,B.; Haupt,M.; Schindler-Saefkow,F.: REVIEW OF PERCOLATING AND NECK-BASED UNDERFILLS WITH THERMAL CONDUCTIVITIES UP TO 3 W/m-K. IEEE Intersociety Conference on Thermal and Thermomechanical Phenomena in Electronic Systems (ITherm), Las Vegas (USA), 2016 May 31-Jun 3; Proceedings, 15 (2016) pp 140-150 (ISBN ISSN: 1087-9870) |
| Bueker,M.-J.; Hedayat,C.; Hilleringmann,U.; Gessner,T.: Efficient design methodology for inductive energy transmission. Smart System Integration - International Conference and Exhibition on Integration Issues of Miniaturized Systems (SSI 2016), Munich (Germany), 2016 Mar 9-10 |
| Clemente,I.; Koehler,N.; Miakonkikh,A.; Zimmermann,S.; Schulz,S.E.; Rudenko,K.: CF3Br plasma cryo etching of low-k porous dielectric. 3rd International School and Conference on Optoelectronics, Photonics, Engineering and Nanostructures (Saint Petersburg OPEN 2016), St Petersburg (Russia), 2016 28–30 Mar; Journal of Physics: Conference Series 741 (2016) 012204 |
| Croy,A.; Wagner,C.; Schuster,J.: Mechanical and vibrational properties of strained carbon nano-materials. DPG Spring Meeting of the Condensed Matter Section, Regensburg, 2016 Mar 6 - 11; Abstract in Verhandl. DPG, 51, VI (2016) p 291 (ISSN 0420-0195) |
| Dhakal,D.; Assim,K.; Lang,H.; Bruener,P.; Grehl,T.; Georgi,C.; Waechtler,T.; Ecke,R.; Schulz,S.E.; Gessner,T.: Atomic layer deposition of ultrathin Cu2O and subsequent reduction to Cu studied by in situ x-ray photoelectron spectroscopy. J. Vac. Sci. Technol. A, 34, 1 (2016) pp 01A111 1-12 |
| Dinh,Nghia Trong; Sowade,Enrico; Blaudeck,T.; Hermann,S.; Rodriguez,Raul D.; Zahn,Dietrich R.T.; Schulz,S.E.; Baumann,R.R.; Kanoun,Olfa: High-resolution inkjet printing of conductive carbon nanotube twin lines utilizing evaporation-driven self-assembly. Carbon, 96 (2016) pp 382-393 (ISSN 0008-6223) |
| Ebermann,M.; Neumann,N.; Hiller,K.; Seifert,M.; Meinig,M.; Kurth,S.: Tunable MEMS Fabry-Pérot filters for infrared microspectrometers: a review. MOEMS and Miniaturized Systems XV, San Francisco, CA (USA), 2016 Feb 15-17; Proceedings of SPIE, 9760 (2016) p 97600H (ISBN 9781628419955) |
| Foerster,A.; Wagner,C.; Schuster,J.; Friedrich,J.: Ab initio study of the trimethylaluminum atomic layer deposition process on carbon nanotubes—An alternative initial step. J. Vac. Sci. Technol. A, 35 (2016) p 01B113 |
| Forke,R.; Shaporin,A.; Weidlich,S.; Tsapkolenko,A.; Hiller,K.; Hahn,S.; Kuechler,M.; Koehler,D.; Konietzka,S.; Motl,T.; Friese,H.; Billep,D.: Hochpräzises MEMS-Gyroskop. 26. Chemnitzer Seminar , Chemnitz (Germany), 2016 Nov 30 |
| Franz,M.; Ecke,R.; Kaufmann,C.; Krause,S.; Kriz,J.; Schulz,S.E.: Characterisation of the barrier formation process of self-forming barriers with CuMn, CuTi and CuZr alloys. MAM/IITC, Grenoble, 2015 Mar; Microelectronic Engineering, 156 (2016) pp 65-69 |
| Gabler,F.; Roscher,F.; Doering,R.; Otto,A.; Ziesche,S.; Ihle,M.; Celik,Y.; Dietz,D.; Goehlich,M.; Kappert,H.; Vogt,H.; Naumann,F; Gessner,T.: Materials and technologies to enable high temperature stable MEMS and electronics for smart systems used in harsh environments. Semiconductor Technology International Conference (CSTIC), Shanghai (China), 2016 Mar 13-14 (ISBN 978-1-4673-8804-7) |
| Gessner,T.; Hofmann,L.; Wang,W.-S.; Baum,M.; Seifert,T.; Wiemer,M.; Schulz,S.E.: 3D integration technologies for MEMS (invited talk). International Conference on Solid-State and Integrated Circuit Technology (ICSICT), Hang Zhou (China), 2016 Oct 25-28; IEEE Proceedings, pp 334-337 |
| Hann,J.; Billep,D.; Gessner,T.: Selective deposition of PEDOT:PSS on PMMA substrate with electrostatic forces via Nanoxerography. ICOT2016 International Conference on Organic and Hybrid Thermoelectrics, Kyoto, 18.-20.01.2016 |
| Hann,J.; Helke,C.; Nestler,J.; Gessner,T.: Surface patterning and assembly of DNA Origami structures by electrostatic forces. DNA Nanotechnology, Jena, 19.-21.05.2016; Proceedings |
| Hann,J.; Helke,C.; Thamm,S.; Fischer,F.; Mertig,M.; Gessner,T.: Surface Assembling of DNA Origami Templates via Electrostatic Forces. 2nd International Conference nanoFIS 2016 - Integrated Functional nano Systems, Graz, 27.-29.06.2016; Proceedings |
| Hartmann,M.; Schubel,R.; Toader,M.; Jordan,R.; Schulz,S.E.; Hermann,S.: In-situ polymerization of carbon nanotube based field-effect transistors. NT16, Wien, 2016 Aug 7-13 |
| Hartmann,Steffen; Sturm,Heinz; Blaudeck,T.; Hoelck,Ole; Hermann,S.; Schulz,S.E.; Gessner,T.; Wunderle,B.: Experimental and computational studies on the role of surface functional groups in the mechanical behavior of interfaces between single-walled carbon nanotubes and metals. Journal of Materials Science, 2016, 51 (3) (2016) pp 1217-1233 (ISBN 1573-4803; 0022-2461) |
| Hartwig,M.; Gaitzsch,M.; Grossmann,T.D.; Heinrich,M.; Kroll,L.; Gessner,T.; Baumann,R.R.: Investigation on an Inkjet Printed Passive Sensor for Wireless Ice Detection on Wind Rotor Blades. Journal of Imaging Science and Technology, 60, 4 (2016) pp 40402-1 - 40402-7 |
| Hartwig,M.; Gaitzsch,M.; Grossmann,T.D.; Heinrich,M.; Kroll,L.; Gessner,T.; Baumann,R.R.: Investigation on an Inkjet Printed Passive Sensor for Wireless Ice Detection on Wind Rotor Blades. Printing for Fabrication 2016 (NIP), Manchester (UK), 2016 Sep 15; Talk |
| Hartwig,M.; Grossmann,T.D.; Heinrich,M.; Kroll,L.; Gessner,T.; Baumann,R.R.: Investigation on Inkjet Printed Passive Sensors for the Application in Lightweight Structures. NANOfIM 2016, Chemnitz (Germany), 2016 Sep 9; Talk |
| Hartwig,M.; Ortlepp,F.; Moebius,M.; Martin,J.; Otto,T.; Gessner,T.; Baumann,R.R.: Investigation on inkjet-printing of functional components for the manufacturing of a quantum dot based sensor for mechanical load detection. LOPEC 16, Munich (Germany), 2016 Apr 7; Talk |
| Helke,C.; Meinig,M.; Seifert,M.; Seiler,J.; Hiller,K.; Kurth,S.; Martin,J.; Gessner,T.: VIS Fabry-Pérot-Interferometer with (HL)4 PE-Si3N4/PE-SiO2 reflectors on freestanding LP-Si3N4 membranes for surface enhanced Raman spectroscopy. SPIE Photonics West, San Francisco, 13.-18.02.2016; SPIE Proceedings, Vol. 9760 (2016) pp 1-11 |
| Hermann,S.; Boettger,S.; Schulz,S.E.; Hartmann,S.; Wunderle,B.; Voigt,S.; Mehner,J.: Piezoresistive carbon nanotubes for condition monitoring and reliability considerations. NANOFIM - Nanotechnology for Instrumentation and Measurement Workshop, Chemnitz, 2016 Sep 8-9 |
| Hermann,S.; Claus,M.; Schulz,S.E.; Schroeter,M: Modeling and Technology Platform for Analog High Frequency Carbon Nanotube Transistors. Nano Science and Technology, 6th Annual World Congress, Singapore, 2016 Oct 26-28 |
| Hermann,S.; Claus,M.; Schulz,S.E.; Schroeter,M.: Wafer-level technology platform for manufacturing of high performance CNT devices in electronics and sensors. 17th International Conference on the Science and Application of Nanotubes and Low-Dimensional Materials (NT16), Wien, 7.-13. August |
| Hermann,S.; Claus,M.; Schulz,S.E.; Schroeter,M.: Modeling and Technology Platform for Analog High Frequency Carbon Nanotube Transistors. NANOFIM - Nanotechnology for Instrumentation and Measurement Workshop, Chemnitz, 2016 Sep 8-9 |
| Hermann,S.; Claus,M.; Schulz,S.E.; Schroeter,M.: Modeling and Technology Platform for Analog High Frequency Carbon Nanotube Transistors. 29th International Microprocesses and Nanotechnology Conference, Kyoto, 2016 Nov 8-11 |
| Hofmann,L.; Baum,M.; N.K.Devadass; Schubert,I.; Kuechler,M.; Ecke,R.; Wiemer,M.; Schulz,S.E.; Gessner,T.: 3D-Wafer Level Packaging For Mems By Using A Via Middle Approach Based On Copper Through Silicon Vias Combined With Copper Thermo-Compression Bonding. International Wafer-Level-Packaging Conference (IWLPC), San Jose, 18.-20.10.; SMTA Proceedings |
| Hofmann,L.; Fischer,T.; Werner,T.; Selbmann,F.; Rennau,M.; Ecke,R.; Schulz,S.E.; Gessner,T.: Study on TSV isolation liners for a Via Last approach with the use in 3D-WLP for MEMS. Microsystem Technologies, 22, 7 (2016) p 1665–1677 |
| Hu,X.; Schuster,J.; Schulz,S.E.; Gessner,T.: Large-scale reactive dynamics simulations of Cu ALD using a newly developed ReaxFF potential. ALD 2016, Dublin, 2016 July 25-27 |
| Jafarpour,S.; Kini.M; Hermann,S.; Schulz,S.E.: Effects of bilayer Co-Mo catalyst configurations on CVD synthesis of semiconducting SWCNTs. MAM, Brussel(Belgium), 2016 Mar 20-23 |
| Jafarpour,S.; Kini.M; Schulz,S.E.; Hermann,S.: Effect of different bilayer catalyst configurations on quality and electronic type selectivity of CVD grown SWCNTs. NT16, Vienna (Austria), 2016 Aug 7-13 |
| Jeschke,J.; Moeckel,S.; Korb,M.; Rueffer,T.; Assim,K.; Melzer,M.; Herwig,G.; Georgi,C.; Schulz,S.E.; Lang,H.: Chemical vapor deposition of ruthenium-based layers by a single-source approach. Journal of Materials Chemistry C, 4 (2016) pp 2319--2328 |
| Koehler,N.; Fischer,T.; Zimmermann,S.; Schulz,S.E.: A plasma assisted in situ restoration process for sidewall damaged ULK dielectrics. Microelectronic Engineering (ISSN 0167-9317) |
| Kuechler,M.; Hofmann,C.: Waferadapter am elektrostatischen Chuck; Nanostrukturierung mit DRIE. 6. Workshop "Tiefes Siliziumätzen", Erfurt, CiS Forschungsinstitut für Mikrosensorik GmbH, 2016 NOV 30 |
| Meinig,M.; Kurth,S.; Seifert,M.; Hiller,K.; Wecker,J.; Ebermann,M.; Neumann,N.; Gessner,T.: Tunable Fabry-Pérot interferometer with subwavelength grating reflectors for MWIR microspectrometers. Advanced Fabrication Technologies for Micro/Nano Optics and Photonics IX, San Francisco, CA (USA), 2016 Feb 14-17; Proceedings of SPIE, 9759 (2016) p 97590W (ISBN 9781628419948) |
| Neumann,N.; Ebermann,M.; Hiller,K.; Seifert,M.; Meinig,M.; Kurth,S.: MEMS Tunable Fabry-Pérot Filters for Infrared Microspectrometer Applications. Applied Industrial Optics: Spectroscopy, Imaging and Metrology, Heidelberg, 2016 Jul 25-28; Proceedings of Imaging and Applied Optics 2016 (ISBN 978-1-943580-15-6) |
| Roscher,F.; Saeidi,N.; Enderlein,T.; Wiemer,M.; Gessner,T.: A new approach for 3D Integration based on printed multilayers and through polymer vias. Smart systems integration 2016, München, 2016 Mar 9-10 |
| Saeidi,N.; Baum,M.; Wiemer,M.; Hecker,J.; Reimer,A.: Toward MR Compatible Endoscopy: Design and Development of a Prototype Endoscope. 20th International Symposium on Endoscopic Ultrasonography, Budapest, 2016 Sep 22-23 |
| Selbmann,F.; Baum,M.; Wiemer,M.; Gessner,T.: Parylene C Deposition and Characterization of its Barrier Properties for the Encapsulation of MEMS for Medical Applications. Smart Systems Integration Conference, Munich, 2016 Mar 9-10; Proceedings, pp 97-104 (ISBN ISBN 978-3-95735-040-4) |
| Selbmann,F.; Baum,M.; Wiemer,M.; Gessner,T.: Parylene C Deposition and Characterization of its Barrier Properties for the Encapsulation of MEMS for Medical Applications. Smart Systems Integration SSI, Munich (Germany), 2016 Mar 9-10; Proceedings |
| Selbmann,F.; Baum,M.; Wiemer,M.; Gessner,T.: Deposition of Parylene C and Characterization of its Hermeticity for the Encapsulation of MEMS and Medical Devices. The 11th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2016) , Matsushima (Japan) & Sendai (Japan), 2016 Apr 17-20; Proceedings |
| Seliger,C.; Billep,D.; Forke,R.; Stoeckel,C.; Schulze,R.: Zukunftsorientiertes Messsystem zur Maschinendiagnostik . 5. Landshuter Symposium Mikrosystemtechnik , Landshut, 2016 Mar 9-10; Tagungsband, pp 90-98 (ISBN 978-3-9812696-9-7) |
| Streit,P.; Nestler,J.; Shaporin,A.; Schulze,R.; Gessner,T.: Thermal Design of Integrated Heating for Lab-on-a-Chip Systems. Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE), 2015 16th International Conference on , Montpellier (France), 2016 Apr 17-20; Proceedings |
| Tanaka,K.; Wang,W.-S.; Baum,M.; Froemel,J.; Hirano,H.; Tanaka,S.; Wiemer,M.; Otto,T.: Investigation of Surface Pre-Treatment Methods for Wafer-Level Cu-Cu Thermo-Compression Bonding. Journal Micromachines, 7, 234 (2016) |
| Teichert,F.; Zienert,A.; Schuster,J.; Schreiber,M.: Electron transport in defective metallic and semiconducting carbon nanotubes. DPG-Frühjahrstagung der SKM, Regensburg (Germany), 2016 Mar 06-11; Talk; Abstract in: Verhandlungen der DPG (ISSN 0420-0195) |
| Teichert,F.; Zienert,A.; Schuster,J.; Schreiber,M.: Electron transport in defective metallic and semiconducting carbon nanotubes. NT16 - 17th International Conference on the Science and Application of Nanotubes and Low-Dimensional Materials, Vienna (Austria), 2016 Aug 07-13; Poster presentation; Abstract in: NT16 Abstract Book |
| Teichert,F.; Zienert,A.; Schuster,J.; Schreiber,M.: Improved recursive Green’s function formalism for defective carbon nanotubes. CCTN16 - 11th International Symposium on Computational Challenges and Tools for Nanotubes, Vienna (Austria), 2016 Aug 13; Poster presentation; Abstract in: NT16 Abstract Book |
| Tittmann-Otto,J.; Hartmann,M.; Schulz,S.E.; Hermann,S.: Wafer-level manufacturing and optimization of CNT-based field-effect transistors. GMM: Mikro-Nano-Integration, Duisburg (Germany), 2016 Oct 05-06; Proceedings, 86 (2016) pp 95-98 (ISBN 978-3-8007-4278-3) |
| Tittmann-Otto,J.; Hermann,S.; Kalbacova,J.; Hartmann,M.; Toader,M.; Rodriguez,R.D.; Schulz,S.E.; Zahn,D.R.T.; Gessner,T.: Effect of cleaning procedures on the electrical properties of carbon nanotube transistors — A statistical study. Journal of Applied Physics, 119 (2016) pp 124509-1 - 124509-8 |
| Vogel,K.; Roscher,F.; Hertel,S.; Wiemer,M.; Gessner,T.: Waferlevel AVT mit Pd/Al-integrierten reaktiven Multilagensystemen. MikroSystemTechnik Kongress , Karlsruhe, 2015 Oct 26-28 (ISBN 978-3-8007-4100-7) |
| Wagner,C.; Schuster,J.; Schleife,A.; Schreiber,M.; Gessner,T.: Optical spectra of strained carbon nanotubes: Ab initio predictions. ICSFS 18: International Conference on Solid Films and Surfaces, Chemnitz, 2016 Aug 28 - Sep 02; Talk |
| Wagner,C.; Schuster,J.; Schreiber,M.; Schleife,A.; Gessner,T.: Optical spectra of strained carbon nanotubes: The origin of strain-induced shifts. CCTN16: 11th International Symposium on Computational Challenges and Tools for Nanotubes, Vienna (Austria), 2016 Aug 28 - Sep 02; Poster |
| Wagner,C.; Schuster,J.; Schreiber,M.; Schleife,A.; Gessner,T.: Ab initio calculation of optical spectra of strained carbon nanotubes. 17th International Conference on the Science and Application of Nanotubes and Low-Dimensional Materials (NT16), Vienna (Austria), 2016 Aug 28 - Sep 02; Poster |
| Wagner,C.; Schuster,J.; Schreiber,M.; Schleife,A.; Gessner,T.: Electronic structure calculations for carbon nanotubes under strain. DPG Spring Meeting of the Condensed Matter Section, Regensburg, 2016 Mar 6 - 11; Abstract in Verhandl. DPG, 51, VI (2016) p 288 (ISSN 0420-0195) |
| Wecker,J.; Bauch,A.; Kurth,S.; Mangalgiri,G.; Gaitzsch,M.; Meinig,M.; Gessner,T.; Nasr,I.; Weigel,R.; Kissinger,D.; Hackner,A.; Prechtel,U.: Oxygen detection system consisting of a millimeter wave Fabry-Pérot resonator and an integrated SiGe front-end. Terahertz, RF, Millimeter, and Submillimeter-Wave Technology and Applications IX, San Francisco, CA (USA), 2016 Feb 15-18; Proceedings of SPIE, 9747 (2016) p 97470C (ISBN 9781628419825) |
| Wen,Q.; Schulze,R.; Billep,D.; Otto,T.; Gessner,T.: Miniaturized vortex-induced vibration energy harvester for low velocity air flow application. Semiconductor Technology International Conference (CSTIC), Shanghai (China), 2016 Mar 13-14; Proceedings |
| Wuensch,D.; Baum,M.; Forke,R.; Wiemer,M.; Hiller,K.; Weidenmueller,J; Dogan,O; Goertz,M.: A highly miniaturized two-axis acceleration sensor for implantable hemodynamic controlling system. BMT 2016, Basel (Switzerland), 2016 Oct 4-6; Biomedical Engineering - Joint journal of the German Society for Biomedical Engineering in VDE and the Austrian and Swiss Societies for Biomedical Engineering, 61, 51 (2016) p 249 (ISBN ISSN 0013-5585 · e-ISSN 1862-278X) |
| Zschenderlein,U.; Baum,M.; Schlottig,G.; Schindler-Saefkow,F.; Kumar,S.G.; Brunschwiler,T.; Wunderle,B.: Re-building the Underfill: Performance of percolating fillers at package scale. IEEE International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE), Montpellier (France), 2016 Apr 18-20; Proceedings, 17th (2016) pp 1-13 (ISBN ISBN 978-1-5090-2106-2) |
